Issued Patents All Time
Showing 25 most recent of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12350787 | Substrate processing apparatus | Kuniaki Yamaguchi, Toshio Mizuno, Mitsuru Miyazaki, Naoki Toyomura, Takuya Inoue | 2025-07-08 |
| 12179312 | Apparatus for polishing, processing system, and method of polishing | Takuya MORIURA, Hiroshi Sotozaki, Tadakazu Sone, Masayoshi Ito, Hisanori Matsuo +1 more | 2024-12-31 |
| 12154797 | Substrate processing method and substrate processing apparatus | Yosuke Himori | 2024-11-26 |
| 12062563 | Substrate processing apparatus, substrate processing system, and substrate processing method | Keita Yagi, Katsuhide Watanabe, Yoichi Shiokawa, Toru Maruyama, Nobuyuki Takahashi | 2024-08-13 |
| 12033847 | Cleaning module, substrate processing apparatus including cleaning module, and cleaning method | Toshio Mizuno, Yosuke Himori, Erina Baba, Tomoatsu Ishibashi | 2024-07-09 |
| 12017323 | Polishing head system and polishing apparatus | Hozumi Yasuda, Akio Yanai, Nobuyuki Takahashi, Takamasa Nakamura, Keisuke Sakata +4 more | 2024-06-25 |
| 11980998 | Polishing device, polishing method, and recording medium for recording program for determining supply position of polishing liquid | Takashi Yamazaki, Ryuichi Kosuge, Tadakazu Sone | 2024-05-14 |
| 11926018 | Apparatus for polishing and method of polishing | Masayoshi Ito, Hisanori Matsuo, Takuya MORIURA | 2024-03-12 |
| 11839948 | Polishing apparatus | Takashi Yamazaki, Ryuichi Kosuge, Tadakazu Sone | 2023-12-12 |
| 11731240 | Substrate processing apparatus | Kuniaki Yamaguchi, Toshio Mizuno, Mitsuru Miyazaki, Naoki Toyomura, Takuya Inoue | 2023-08-22 |
| 11673222 | Polishing head system and polishing apparatus | Katsuhide Watanabe | 2023-06-13 |
| 11465254 | Polishing machine and a polishing method for a substrate | Katsuhide Watanabe, Hozumi Yasuda, Yuji Yagi, Nobuyuki Takahashi, Koichi Takeda | 2022-10-11 |
| 11450544 | Substrate processing apparatus, substrate processing system, and substrate processing method | Keita Yagi, Katsuhide Watanabe, Yoichi Shiokawa, Toru Maruyama, Nobuyuki Takahashi | 2022-09-20 |
| 11192216 | Polishing method and polishing apparatus | Hiromitsu Watanabe, Kuniaki Yamaguchi, Yutaka Wada | 2021-12-07 |
| 11069563 | Method for processing substrate and substrate processing apparatus | Atsuo Katagiri | 2021-07-20 |
| 10792782 | Polishing-amount simulation method for buffing, and buffing apparatus | Kuniaki Yamaguchi, Toshio Mizuno | 2020-10-06 |
| 10665487 | Substrate processing apparatus, substrate processing system, and substrate processing method | Keita Yagi, Katsuhide Watanabe, Yoichi Shiokawa, Toru Maruyama, Nobuyuki Takahashi | 2020-05-26 |
| 10556314 | Head height adjustment device and substrate processing apparatus provided with head height adjustment device | Suguru Sakugawa, Toru Maruyama, Nobuyuki Takahashi, Zhongxin Wen, Yoichi Shiokawa +2 more | 2020-02-11 |
| 10343255 | Polishing apparatus | Yoichi Kobayashi, Katsutoshi Ono, Masaki Kinoshita, Toshifumi Kimba | 2019-07-09 |
| 10201888 | Substrate processing apparatus | Kuniaki Yamaguchi, Toshio Mizuno, Mitsuru Miyazaki, Naoki Toyomura, Takuya Inoue | 2019-02-12 |
| 10183374 | Buffing apparatus, and substrate processing apparatus | Kuniaki Yamaguchi, Toshio Mizuno | 2019-01-22 |
| 10131030 | Buffing apparatus and substrate processing apparatus | Kuniaki Yamaguchi, Toshio Mizuno | 2018-11-20 |
| 9969048 | Polishing apparatus | Yoichi Kobayashi, Katsutoshi Ono, Masaki Kinoshita, Toshifumi Kimba | 2018-05-15 |
| 9700988 | Substrate processing apparatus | Kuniaki Yamaguchi, Toshio Mizuno, Mitsuru Miyazaki, Naoki Toyomura, Takuya Inoue | 2017-07-11 |
| 9401293 | Polishing apparatus and polishing method | Yoichi Kobayashi, Katsutoshi Ono, Masaki Kinoshita, Toshifumi Kimba | 2016-07-26 |