Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12179312 | Apparatus for polishing, processing system, and method of polishing | Takuya MORIURA, Tadakazu Sone, Masayoshi Ito, Itsuki Kobata, Hisanori Matsuo +1 more | 2024-12-31 |
| 11642755 | Apparatus for polishing and method for polishing | Pohan Chen, Tadakazu Sone | 2023-05-09 |
| 11612983 | Polishing apparatus and polishing method | Tadakazu Sone | 2023-03-28 |
| 11465256 | Apparatus for polishing and method for polishing | Pohan Chen, Tadakazu Sone | 2022-10-11 |
| 11426834 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi +5 more | 2022-08-30 |
| 11007621 | Polishing apparatus and polishing method | Tadakazu Sone | 2021-05-18 |
| 10987776 | Calibration method and non-transitory computer-readable storage medium storing a program of calibration | Pohan Chen, Tadakazu Sone, Kenichi Suzuki | 2021-04-27 |
| 10730162 | Turntable cloth peeling jig | Kenichiro Saito, Tadakazu Sone | 2020-08-04 |
| 10661411 | Apparatus for cleaning a polishing surface, polishing apparatus, and method of manufacturing an apparatus for cleaning a polishing surface | Ryuichi Kosuge, Takeshi Kodera, Ryo Hasegawa | 2020-05-26 |
| 10486285 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi +5 more | 2019-11-26 |
| 9687957 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi +5 more | 2017-06-27 |
| 9530676 | Substrate processing apparatus, substrate transfer method and substrate transfer device | Toshio Yokoyama, Junji Kunisawa, Mitsuru Miyazaki, Kenichi Suzuki | 2016-12-27 |
| 9434044 | Polishing apparatus | Ryuichi Kosuge, Takahiro Kawano, Akihiro Mochida | 2016-09-06 |
| 9358662 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi +5 more | 2016-06-07 |
| 8795032 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi +5 more | 2014-08-05 |
| 7850817 | Polishing device and substrate processing device | Satoshi Wakabayashi, Tetsuji Togawa, Ryuichi Kosuge, Koji Ato | 2010-12-14 |
| 6851152 | Substrate cleaning apparatus | Fumitoshi Oikawa | 2005-02-08 |
| 6643882 | Substrate cleaning apparatus | Koji Atoh, Yuki Inoue, Tatsuo Inoue | 2003-11-11 |
| 6616512 | Substrate cleaning apparatus and substrate polishing apparatus with substrate cleaning apparatus | — | 2003-09-09 |
| 6494985 | Method and apparatus for polishing a substrate | Koji Ato | 2002-12-17 |