Issued Patents All Time
Showing 25 most recent of 49 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12208428 | Liquid supplying device and method for draining liquid thereof | Fujihiko Toyomasu | 2025-01-28 |
| 12140980 | Apparatus for supplying liquid, cleaning unit, and apparatus for processing substrate | Fujihiko Toyomasu | 2024-11-12 |
| 12053851 | Jig and installation method using same jig | Lien Yin Cheng, Akira Imamura, Mitsuru Miyazaki | 2024-08-06 |
| 11967508 | Damper control system and damper control method | Akira Imamura, Mitsuru Miyazaki | 2024-04-23 |
| 11890652 | Cleaning chemical liquid supply device and cleaning chemical liquid supply method | Fujihiko Toyomasu | 2024-02-06 |
| 11664252 | Cleaning device, polishing device, and device and method for calculating rotation speed of substrate in cleaning device | Michiaki MATSUDA, Hisajiro Nakano, Fuyuki Ogaki, Yusuke Watanabe | 2023-05-30 |
| 11532491 | Substrate cleaning apparatus, substrate processing apparatus, and method of cleaning substrate | Hisajiro Nakano | 2022-12-20 |
| 11426834 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Kenichi Kobayashi, Hiroshi Sotozaki +5 more | 2022-08-30 |
| 11380559 | Carrier device, work processing apparatus, control method of carrier device and storage medium storing program | Yohei Eto, Teruaki HOMBO, Keiji Kanazawa | 2022-07-05 |
| 11103972 | Buff processing device and substrate processing device | Hideo Aizawa, Mitsuru Miyazaki, Naoki Toyomura | 2021-08-31 |
| 11056359 | Cleaning apparatus and substrate processing apparatus | Teruaki HOMBO | 2021-07-06 |
| 10926301 | Liquid supplying device and liquid supplying method | Fujihiko Toyomasu | 2021-02-23 |
| 10898987 | Table for holding workpiece and processing apparatus with the table | Naoki Toyomura, Mitsuru Miyazaki | 2021-01-26 |
| 10741423 | Substrate cleaning apparatus, substrate processing apparatus, and method of cleaning substrate | Hisajiro Nakano | 2020-08-11 |
| 10575697 | Substrate cleaning apparatus and substrate processing apparatus | Akira Imamura, Mitsuru Miyazaki | 2020-03-03 |
| 10573509 | Cleaning apparatus and substrate processing apparatus | Koji Maeda, Hiroshi Shimomoto, Kuniaki Yamaguchi, Hiroshi Aono, Tetsuya Yashima +6 more | 2020-02-25 |
| 10546764 | Substrate cleaning apparatus and substrate processing apparatus | Akira Imamura, Mitsuru Miyazaki, Shunsuke Matsuzawa | 2020-01-28 |
| 10500691 | Substrate processing apparatus and substrate processing method | Masayoshi Imai, Katsuhiko Tokushige, Suguru Ogura, Katsuhide Watanabe, Takeshi Iizumi +1 more | 2019-12-10 |
| 10486285 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Kenichi Kobayashi, Hiroshi Sotozaki +5 more | 2019-11-26 |
| 10438818 | Substrate processing apparatus and pipe cleaning method for substrate processing apparatus | Toru Maruyama, Masayoshi Imai, Koji Maeda, Mitsuru Miyazaki, Teruaki HOMBO +1 more | 2019-10-08 |
| 10361101 | Substrate cleaning apparatus and substrate processing apparatus X | Yoshitaka Kitagawa, Hisajiro Nakano | 2019-07-23 |
| 10343192 | Liquid supplying device and liquid supplying method | Fujihiko Toyomasu | 2019-07-09 |
| 10340159 | Cleaning chemical supplying device, cleaning chemical supplying method, and cleaning unit | Fujihiko Toyomasu, Toru Maruyama | 2019-07-02 |
| 10018545 | Substrate cleaning apparatus and method executed in the same | Teruaki HOMBO | 2018-07-10 |
| 9892953 | Substrate gripping apparatus | Mitsuru Miyazaki, Naoki Matsuda, Manao Hoshina | 2018-02-13 |