Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10500691 | Substrate processing apparatus and substrate processing method | Masayoshi Imai, Suguru Ogura, Katsuhide Watanabe, Junji Kunisawa, Takeshi Iizumi +1 more | 2019-12-10 |
| 7207864 | Polishing apparatus | Kenji Kamimura, Norio Kimura, Satoshi Okamura, Hideo Aizawa, Makoto Akagi +2 more | 2007-04-24 |
| 7101259 | Polishing method and apparatus | Norio Kimura, Mitsuhiko Shirakashi, Masao Asami, Naoto Miyashita, Masako Kodera +3 more | 2006-09-05 |
| 7040968 | Polishing apparatus | Kenji Kamimura, Norio Kimura, Satoshi Okamura, Hideo Aizawa, Makoto Akagi +2 more | 2006-05-09 |
| 6939208 | Polishing apparatus | Kenji Kamimura, Norio Kimura, Satoshi Okamura, Hideo Aizawa, Makoto Akagi +2 more | 2005-09-06 |
| 6667238 | Polishing method and apparatus | Norio Kimura, Mitsuhiko Shirakashi, Masao Asami, Naoto Miyashita, Masako Kodera +3 more | 2003-12-23 |