Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9287158 | Substrate processing apparatus | Tamami Takahashi, Kenya Ito, Kazuyuki Inoue, Kenji Yamaguchi, Masaya Seki | 2016-03-15 |
| 8133380 | Method for regenerating ion exchanger | Takayuki Saito, Tsukuru Suzuki, Yuji Makita, Kaoru Yamada, Masayuki Kumekawa +5 more | 2012-03-13 |
| 8029333 | Device for polishing peripheral edge of semiconductor wafer | Tamami Takahashi, Kenya Ito, Kazuyuki Inoue, Kenji Yamaguchi, Masaya Seki +5 more | 2011-10-04 |
| 7655118 | Electrolytic processing apparatus and method | Masayuki Kumekawa, Hozumi Yasuda, Itsuki Kobata, Osamu Nabeya | 2010-02-02 |
| 7638030 | Electrolytic processing apparatus and electrolytic processing method | Osamu Nabeya, Masayuki Kumekawa, Hozumi Yasuda, Itsuki Kobata, Takeshi Iizumi +7 more | 2009-12-29 |
| 7569135 | Electrolytic processing apparatus and substrate processing apparatus and method | Masayuki Kumekawa, Hozumi Yasuda, Itsuki Kobata, Ikutaro Noji, Kaori Yoshida | 2009-08-04 |
| 7427345 | Method and device for regenerating ion exchanger, and electrolytic processing apparatus | Takayuki Saito, Tsukuru Suzuki, Yuji Makita, Kaoru Yamada, Masayuki Kumekawa +5 more | 2008-09-23 |
| 7255778 | Electrochemical machining method and apparatus | Yuzo Mori, Yasushi Toma, Itsuki Kobata, Takayuki Saito | 2007-08-14 |
| 7208076 | Substrate processing apparatus and method | Itsuki Kobata, Masayuki Kumekawa, Takayuki Saito, Yasushi Toma, Tsukuru Suzuki +3 more | 2007-04-24 |
| 7108589 | Polishing apparatus and method | Norio Kimura, Katsuya Okumura, You Ishii, Junji Kunisawa, Hiroyuki Yano | 2006-09-19 |
| 7101259 | Polishing method and apparatus | Norio Kimura, Katsuhiko Tokushige, Masao Asami, Naoto Miyashita, Masako Kodera +3 more | 2006-09-05 |
| 7101465 | Electrolytic processing device and substrate processing apparatus | Itsuki Kobata, Masayuki Kumekawa, Takayuki Saito, Yasushi Toma, Tsukuru Suzuki +3 more | 2006-09-05 |
| 6935932 | Polishing apparatus and method | Norio Kimura, Katsuya Okumura, You Ishii, Junji Kunisawa, Hiroyuki Yano | 2005-08-30 |
| 6932884 | Substrate processing apparatus | Takayuki Saito, Tsukuru Suzuki, Yuji Makita, Kaoru Yamada, Kenya Ito | 2005-08-23 |
| 6875335 | Electrolytic machining method and apparatus | Yuzo Mori, Takayuki Saito, Yasushi Toma, Akira Fukunaga, Itsuki Kobata | 2005-04-05 |
| 6743349 | Electrochemical machining method and apparatus | Yuzo Mori, Yasushi Toma, Itsuki Kobata, Takayuki Saito | 2004-06-01 |
| 6722964 | Polishing apparatus and method | Norio Kimura, Katsuya Okumura, You Ishii, Junji Kunisawa, Hiroyuki Yano | 2004-04-20 |
| 6679950 | Cleaning method and cleaner | Hiroshi Tomita, Motoyuki Sato, Soichi Nadahara, Kenya Ito | 2004-01-20 |
| 6667238 | Polishing method and apparatus | Norio Kimura, Katsuhiko Tokushige, Masao Asami, Naoto Miyashita, Masako Kodera +3 more | 2003-12-23 |
| 6602396 | Electrolytic machining method and apparatus | Yuzo Mori, Takayuki Saito, Yasushi Toma, Akira Fukunaga, Itsuki Kobata | 2003-08-05 |
| 6543080 | Apparatus and method for cleaning semiconductor substrate | Hiroshi Tomita, Soichi Nadahara, Kenya Ito, Yuki Inoue | 2003-04-08 |
| 6494220 | Apparatus for cleaning a substrate such as a semiconductor wafer | Naoki Matsuda, Kenya Ito | 2002-12-17 |
| 6368493 | Electrolytic machining method and apparatus | Yuzo Mori, Takayuki Saito, Yasushi Toma, Akira Fukunaga, Itsuki Kobata | 2002-04-09 |
| 6308361 | Cleaning apparatus | Naoki Matsuda, Kenya Ito | 2001-10-30 |
| 6248009 | Apparatus for cleaning substrate | Kenya Ito, Naoki Matsuda, Fumitoshi Oikawa, Koji Ato | 2001-06-19 |