Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8133380 | Method for regenerating ion exchanger | Takayuki Saito, Tsukuru Suzuki, Yuji Makita, Kaoru Yamada, Hozumi Yasuda +5 more | 2012-03-13 |
| 7976362 | Substrate polishing apparatus and method | Seiji Katsuoka, Masahiko Sekimoto, Junji Kunisawa, Mitsuru Miyazaki, Teruyuki Watanabe +2 more | 2011-07-12 |
| 7655118 | Electrolytic processing apparatus and method | Mitsuhiko Shirakashi, Hozumi Yasuda, Itsuki Kobata, Osamu Nabeya | 2010-02-02 |
| 7638030 | Electrolytic processing apparatus and electrolytic processing method | Osamu Nabeya, Hozumi Yasuda, Itsuki Kobata, Takeshi Iizumi, Nobuyuki Takada +7 more | 2009-12-29 |
| 7585205 | Substrate polishing apparatus and method | Seiji Katsuoka, Masahiko Sekimoto, Junji Kunisawa, Mitsuru Miyazaki, Teruyuki Watanabe +2 more | 2009-09-08 |
| 7569135 | Electrolytic processing apparatus and substrate processing apparatus and method | Mitsuhiko Shirakashi, Hozumi Yasuda, Itsuki Kobata, Ikutaro Noji, Kaori Yoshida | 2009-08-04 |
| 7427345 | Method and device for regenerating ion exchanger, and electrolytic processing apparatus | Takayuki Saito, Tsukuru Suzuki, Yuji Makita, Kaoru Yamada, Hozumi Yasuda +5 more | 2008-09-23 |
| 7208076 | Substrate processing apparatus and method | Itsuki Kobata, Mitsuhiko Shirakashi, Takayuki Saito, Yasushi Toma, Tsukuru Suzuki +3 more | 2007-04-24 |
| 7166204 | Plating apparatus and method | Satoshi Sendai, Kenya Tomioka, Katsumi Tsuda, Koji Mishima | 2007-01-23 |
| 7101465 | Electrolytic processing device and substrate processing apparatus | Itsuki Kobata, Mitsuhiko Shirakashi, Takayuki Saito, Yasushi Toma, Tsukuru Suzuki +3 more | 2006-09-05 |
| 7083706 | Substrate processing apparatus | — | 2006-08-01 |
| 6913514 | Chemical mechanical polishing endpoint detection system and method | Norio Kimura, Huey-Ming Wang | 2005-07-05 |
| 6558518 | Method and apparatus for plating substrate and plating facility | Satoshi Sendai, Akihisa Hongo, Kenya Tomioka, Katsumi Tsuda, Naoaki Ogure +1 more | 2003-05-06 |