| 8777198 |
Substrate holding apparatus, substrate holding method, and substrate processing apparatus |
Masahiko Sekimoto, Seiji Katsuoka, Naoki Dai, Takahiro Ogawa, Kenichi Suzuki +3 more |
2014-07-15 |
| 8225803 |
Substrate processing method and apparatus |
Seiji Katsuoka, Masahiko Sekimoto, Toshio Yokoyama, Takahiro Ogawa, Kenichi Kobayashi +2 more |
2012-07-24 |
| 8141513 |
Substrate holding apparatus, substrate holding method, and substrate processing apparatus |
Masahiko Sekimoto, Seiji Katsuoka, Naoki Dai, Takahiro Ogawa, Kenichi Suzuki +3 more |
2012-03-27 |
| 7976362 |
Substrate polishing apparatus and method |
Seiji Katsuoka, Masahiko Sekimoto, Junji Kunisawa, Mitsuru Miyazaki, Kenichi Kobayashi +2 more |
2011-07-12 |
| 7959977 |
Substrate processing method and apparatus |
Seiji Katsuoka, Masahiko Sekimoto, Toshio Yokoyama, Takahiro Ogawa, Kenichi Kobayashi +2 more |
2011-06-14 |
| 7886685 |
Substrate holding apparatus, substrate holding method, and substrate processing apparatus |
Masahiko Sekimoto, Seiji Katsuoka, Naoki Dai, Takahiro Ogawa, Kenichi Suzuki +3 more |
2011-02-15 |
| 7735451 |
Substrate processing method and apparatus |
Seiji Katsuoka, Masahiko Sekimoto, Toshio Yokoyama, Takahiro Ogawa, Kenichi Kobayashi +2 more |
2010-06-15 |
| 7735450 |
Substrate holding apparatus |
Seiji Katsuoka, Masahiko Sekimoto, Ryo Kato, Toshio Yokoyama, Kenichi Suzuki +1 more |
2010-06-15 |
| 7585205 |
Substrate polishing apparatus and method |
Seiji Katsuoka, Masahiko Sekimoto, Junji Kunisawa, Mitsuru Miyazaki, Kenichi Kobayashi +2 more |
2009-09-08 |
| 7575636 |
Substrate processing apparatus and substrate processing method |
Seiji Katsuoka, Masahiko Sekimoto, Toshio Yokoyama, Takahiro Ogawa, Kenichi Kobayashi +4 more |
2009-08-18 |
| 7442257 |
Substrate processing apparatus and substrate processing method |
Seiji Katsuoka, Masahiko Sekimoto, Toshio Yokoyama, Takahiro Ogawa, Kenichi Kobayashi +4 more |
2008-10-28 |
| 7368016 |
Substrate processing unit and substrate processing apparatus |
Seiji Katsuoka, Masahiko Sekimoto, Ryo Kato, Toshio Yokoyama, Kenichi Suzuki +1 more |
2008-05-06 |
| 7235135 |
Substrate processing apparatus and substrate processing method |
Mitsuru Miyazaki, Seiji Katsuoka, Yasuyuki Motojima |
2007-06-26 |
| 7087117 |
Substrate processing apparatus and substrate processing method |
Seiji Katsuoka, Masahiko Sekimoto, Toshio Yokoyama, Takahiro Ogawa, Kenichi Kobayashi +4 more |
2006-08-08 |