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Substrate holding apparatus, substrate holding method, and substrate processing apparatus |
Masahiko Sekimoto, Seiji Katsuoka, Teruyuki Watanabe, Takahiro Ogawa, Kenichi Suzuki +3 more |
2014-07-15 |
| 8141513 |
Substrate holding apparatus, substrate holding method, and substrate processing apparatus |
Masahiko Sekimoto, Seiji Katsuoka, Teruyuki Watanabe, Takahiro Ogawa, Kenichi Suzuki +3 more |
2012-03-27 |
| 7886685 |
Substrate holding apparatus, substrate holding method, and substrate processing apparatus |
Masahiko Sekimoto, Seiji Katsuoka, Teruyuki Watanabe, Takahiro Ogawa, Kenichi Suzuki +3 more |
2011-02-15 |
| 7575636 |
Substrate processing apparatus and substrate processing method |
Seiji Katsuoka, Masahiko Sekimoto, Toshio Yokoyama, Teruyuki Watanabe, Takahiro Ogawa +4 more |
2009-08-18 |
| 7442257 |
Substrate processing apparatus and substrate processing method |
Seiji Katsuoka, Masahiko Sekimoto, Toshio Yokoyama, Teruyuki Watanabe, Takahiro Ogawa +4 more |
2008-10-28 |
| 7087117 |
Substrate processing apparatus and substrate processing method |
Seiji Katsuoka, Masahiko Sekimoto, Toshio Yokoyama, Teruyuki Watanabe, Takahiro Ogawa +4 more |
2006-08-08 |
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Substrate processing apparatus |
Masaya Seki, Akihiro Yazawa, Toshio Yokoyama, Akira Owatari |
2004-11-30 |