Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8777198 | Substrate holding apparatus, substrate holding method, and substrate processing apparatus | Masahiko Sekimoto, Seiji Katsuoka, Teruyuki Watanabe, Takahiro Ogawa, Kenichi Suzuki +3 more | 2014-07-15 |
| 8141513 | Substrate holding apparatus, substrate holding method, and substrate processing apparatus | Masahiko Sekimoto, Seiji Katsuoka, Teruyuki Watanabe, Takahiro Ogawa, Kenichi Suzuki +3 more | 2012-03-27 |
| 7886685 | Substrate holding apparatus, substrate holding method, and substrate processing apparatus | Masahiko Sekimoto, Seiji Katsuoka, Teruyuki Watanabe, Takahiro Ogawa, Kenichi Suzuki +3 more | 2011-02-15 |
| 7575636 | Substrate processing apparatus and substrate processing method | Seiji Katsuoka, Masahiko Sekimoto, Toshio Yokoyama, Teruyuki Watanabe, Takahiro Ogawa +4 more | 2009-08-18 |
| 7442257 | Substrate processing apparatus and substrate processing method | Seiji Katsuoka, Masahiko Sekimoto, Toshio Yokoyama, Teruyuki Watanabe, Takahiro Ogawa +4 more | 2008-10-28 |
| 7087117 | Substrate processing apparatus and substrate processing method | Seiji Katsuoka, Masahiko Sekimoto, Toshio Yokoyama, Teruyuki Watanabe, Takahiro Ogawa +4 more | 2006-08-08 |
| 6824613 | Substrate processing apparatus | Masaya Seki, Akihiro Yazawa, Toshio Yokoyama, Akira Owatari | 2004-11-30 |