Issued Patents All Time
Showing 1–25 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11583973 | Polishing apparatus | Hiroyuki Shinozaki, Yuta Suzuki, Taro Takahashi, Masahiro Hatakeyama | 2023-02-21 |
| 11426834 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi, Hiroshi Sotozaki +5 more | 2022-08-30 |
| 10688620 | Polishing apparatus | Hiroyuki Shinozaki, Yuta Suzuki, Taro Takahashi, Masahiro Hatakeyama | 2020-06-23 |
| 10486285 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi, Hiroshi Sotozaki +5 more | 2019-11-26 |
| 9687957 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi, Hiroshi Sotozaki +5 more | 2017-06-27 |
| 9358662 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi, Hiroshi Sotozaki +5 more | 2016-06-07 |
| 9144881 | Polishing apparatus and polishing method | Hidetaka Nakao, Soichi Isobe, Naoki Matsuda | 2015-09-29 |
| 8795032 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi, Hiroshi Sotozaki +5 more | 2014-08-05 |
| 8777198 | Substrate holding apparatus, substrate holding method, and substrate processing apparatus | Masahiko Sekimoto, Naoki Dai, Teruyuki Watanabe, Takahiro Ogawa, Kenichi Suzuki +3 more | 2014-07-15 |
| 8257143 | Method and apparatus for polishing object | Manabu Tsujimura | 2012-09-04 |
| 8225803 | Substrate processing method and apparatus | Masahiko Sekimoto, Toshio Yokoyama, Teruyuki Watanabe, Takahiro Ogawa, Kenichi Kobayashi +2 more | 2012-07-24 |
| 8141513 | Substrate holding apparatus, substrate holding method, and substrate processing apparatus | Masahiko Sekimoto, Naoki Dai, Teruyuki Watanabe, Takahiro Ogawa, Kenichi Suzuki +3 more | 2012-03-27 |
| 8133376 | Substrate holder, plating apparatus, and plating method | Junichiro Yoshioka, Masahiko Sekimoto, Yasuhiko Endo, Yugang Guo | 2012-03-13 |
| 8038136 | Hand having rocking mechanism and substrate delivering device having the same | Hiroki SANEMASA, Hideo Yamamoto, Naoomi Torii, Takahiro Ogawa, Hidetaka Nakao +1 more | 2011-10-18 |
| 7976362 | Substrate polishing apparatus and method | Masahiko Sekimoto, Junji Kunisawa, Mitsuru Miyazaki, Teruyuki Watanabe, Kenichi Kobayashi +2 more | 2011-07-12 |
| 7959977 | Substrate processing method and apparatus | Masahiko Sekimoto, Toshio Yokoyama, Teruyuki Watanabe, Takahiro Ogawa, Kenichi Kobayashi +2 more | 2011-06-14 |
| 7886685 | Substrate holding apparatus, substrate holding method, and substrate processing apparatus | Masahiko Sekimoto, Naoki Dai, Teruyuki Watanabe, Takahiro Ogawa, Kenichi Suzuki +3 more | 2011-02-15 |
| 7807027 | Substrate holder, plating apparatus, and plating method | Junichiro Yoshioka, Masahiko Sekimoto, Yasuhiko Endo, Yugang Guo | 2010-10-05 |
| 7735450 | Substrate holding apparatus | Masahiko Sekimoto, Teruyuki Watanabe, Ryo Kato, Toshio Yokoyama, Kenichi Suzuki +1 more | 2010-06-15 |
| 7735451 | Substrate processing method and apparatus | Masahiko Sekimoto, Toshio Yokoyama, Teruyuki Watanabe, Takahiro Ogawa, Kenichi Kobayashi +2 more | 2010-06-15 |
| 7585205 | Substrate polishing apparatus and method | Masahiko Sekimoto, Junji Kunisawa, Mitsuru Miyazaki, Teruyuki Watanabe, Kenichi Kobayashi +2 more | 2009-09-08 |
| 7575636 | Substrate processing apparatus and substrate processing method | Masahiko Sekimoto, Toshio Yokoyama, Teruyuki Watanabe, Takahiro Ogawa, Kenichi Kobayashi +4 more | 2009-08-18 |
| 7442257 | Substrate processing apparatus and substrate processing method | Masahiko Sekimoto, Toshio Yokoyama, Teruyuki Watanabe, Takahiro Ogawa, Kenichi Kobayashi +4 more | 2008-10-28 |
| 7374646 | Electrolytic processing apparatus and substrate processing method | Hidenao Suzuki, Kazufumi Nomura, Kunihito Ide, Hiroyuki Kanda, Koji Mishima +2 more | 2008-05-20 |
| 7368016 | Substrate processing unit and substrate processing apparatus | Masahiko Sekimoto, Teruyuki Watanabe, Ryo Kato, Toshio Yokoyama, Kenichi Suzuki +1 more | 2008-05-06 |