| 12358098 |
Liquid feeder and polishing apparatus |
Kuniaki Yamaguchi, Masayuki Tamura, Kenji Shinkai, Yusuke MOCHIDA |
2025-07-15 |
| 11541502 |
Substrate processing apparatus |
Kuniaki Yamaguchi, Hiroshi Shimomoto, Koji Maeda, Kenji Shinkai, Hidetatsu Isokawa +5 more |
2023-01-03 |
| 10688622 |
Substrate processing apparatus |
Hiroshi Aono, Kuniaki Yamaguchi, Hiroshi Shimomoto, Koji Maeda, Tetsuya Yashima +5 more |
2020-06-23 |
| 9842732 |
Substrate cleaning apparatus and substrate cleaning method |
Koji Maeda, Hiroshi Shimomoto, Hideaki Tanaka |
2017-12-12 |
| 9704728 |
Substrate cleaning apparatus and substrate cleaning method |
Koji Maeda, Hiroshi Shimomoto, Hideaki Tanaka |
2017-07-11 |
| 9144881 |
Polishing apparatus and polishing method |
Hidetaka Nakao, Seiji Katsuoka, Naoki Matsuda |
2015-09-29 |
| 8382558 |
Apparatus for dressing a polishing pad, chemical mechanical polishing apparatus and method |
Katsuhide Watanabe, Ryuichi Kosuge |
2013-02-26 |
| 8298369 |
Liquid supply method, liquid supply apparatus, substrate polishing apparatus, and method of measuring supply flow rate of liquid |
Koji Maeda, Ryuichi Kosuge, Hiroshi Shimomoto, Toru Niwa |
2012-10-30 |
| 7645185 |
Substrate delivery mechanism |
Hideo Aizawa, Hiroomi Torii, Daisuke Koga, Satoshi Wakabayashi |
2010-01-12 |
| 7160180 |
Substrate delivery mechanism |
Hideo Aizawa, Hiroomi Torii, Daisuke Koga, Satoshi Wakabayashi |
2007-01-09 |
| 7083506 |
Polishing apparatus |
Hiroomi Torii, Hideo Aizawa |
2006-08-01 |
| 7063598 |
Substrate delivery mechanism |
Hideo Aizawa, Hiroomi Torii, Daisuke Koga, Satoshi Wakabayashi |
2006-06-20 |
| 6783445 |
Polishing apparatus |
Hiroomi Torii, Hideo Aizawa |
2004-08-31 |
| 6783427 |
Polishing system with air exhaust system |
Tadakazu Sone, Takuji Hayama, Manabu Tsujimura |
2004-08-31 |
| 6746312 |
Polishing method and polishing apparatus |
Hiroomi Torii, Hiroshi Kojima, Suguru Ogura |
2004-06-08 |
| 5716036 |
Mounting structure for mounting a polygon mirror |
Kazunori Hashimoto, Tohru Maruyama |
1998-02-10 |
| 5598291 |
Polygon mirror mounting structure |
Masaaki Sano, Yoshio Inoue, Kazuo Shimizu |
1997-01-28 |
| 5373391 |
Polygon mirror with embedded yoke |
Kimio Komata, Toshiaki Ishii, Yuuichi Komai |
1994-12-13 |