Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12119246 | Method, device, and non-transitory computer readable medium for determining timing of removing substrate from cassette in substrate processing device, and substrate processing device | — | 2024-10-15 |
| 11541502 | Substrate processing apparatus | Kuniaki Yamaguchi, Hiroshi Shimomoto, Soichi Isobe, Koji Maeda, Kenji Shinkai +5 more | 2023-01-03 |
| 11380561 | Cleaning device, substrate processing apparatus, maintenance method of cleaning device, and computer-readable recording medium including maintenance program of cleaning device | Mitsuhiko Inaba, Haiyang Xu | 2022-07-05 |
| 11173523 | Substrate processing apparatus | Koji Maeda, Xu Haiyang, Shun Ehara | 2021-11-16 |
| 10957546 | Substrate processing apparatus and method of controlling the same | — | 2021-03-23 |
| 10845777 | Teaching device and teaching method | — | 2020-11-24 |
| 10688622 | Substrate processing apparatus | Hiroshi Aono, Kuniaki Yamaguchi, Hiroshi Shimomoto, Koji Maeda, Tetsuya Yashima +5 more | 2020-06-23 |
| 10573509 | Cleaning apparatus and substrate processing apparatus | Koji Maeda, Hiroshi Shimomoto, Kuniaki Yamaguchi, Hiroshi Aono, Tetsuya Yashima +6 more | 2020-02-25 |