Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11541502 | Substrate processing apparatus | Kuniaki Yamaguchi, Hiroshi Shimomoto, Soichi Isobe, Koji Maeda, Kenji Shinkai +5 more | 2023-01-03 |
| 11173523 | Substrate processing apparatus | Hidetatsu Isokawa, Koji Maeda, Xu Haiyang | 2021-11-16 |