Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12358098 | Liquid feeder and polishing apparatus | Kuniaki Yamaguchi, Masayuki Tamura, Soichi Isobe, Yusuke MOCHIDA | 2025-07-15 |
| 11541502 | Substrate processing apparatus | Kuniaki Yamaguchi, Hiroshi Shimomoto, Soichi Isobe, Koji Maeda, Hidetatsu Isokawa +5 more | 2023-01-03 |
| 11472002 | Substrate polishing apparatus | Hiroyuki Shinozaki, Hiroshi Aono, Tadakazu Sone, Hideo Aizawa | 2022-10-18 |
| 10688622 | Substrate processing apparatus | Hiroshi Aono, Kuniaki Yamaguchi, Hiroshi Shimomoto, Koji Maeda, Tetsuya Yashima +5 more | 2020-06-23 |
| 10576604 | Substrate polishing apparatus | Hiroyuki Shinozaki, Hiroshi Aono, Tadakazu Sone, Hideo Aizawa | 2020-03-03 |
| 10573509 | Cleaning apparatus and substrate processing apparatus | Koji Maeda, Hiroshi Shimomoto, Kuniaki Yamaguchi, Hiroshi Aono, Tetsuya Yashima +6 more | 2020-02-25 |
| 9724798 | Cover for component of polishing apparatus, component of polishing apparatus, and polishing apparatus | Tadakazu Sone, Hideo Aizawa, Hiroshi Aono | 2017-08-08 |
| 9666469 | Lifting device, substrate processing apparatus having lifting device, and unit transferring method | Hiroyuki Shinozaki, Tadakazu Sone, Hideo Aizawa, Hiroshi Aono, Toshio Yokoyama | 2017-05-30 |