Issued Patents All Time
Showing 1–25 of 92 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12257666 | Surface height measurement method using dummy disk | Yasuyuki Motoshima | 2025-03-25 |
| 12226825 | Buffer chamber and AM system including a buffer chamber | Junki Asai, Yoshitaka Mukaiyama | 2025-02-18 |
| 12208488 | Coupling mechanism with spherical bearing, method of determining bearing radius of spherical bearing, and substrate polishing apparatus | — | 2025-01-28 |
| D1035468 | Measurement jig | — | 2024-07-16 |
| D1034248 | Measurement jig | — | 2024-07-09 |
| 11583973 | Polishing apparatus | Yuta Suzuki, Taro Takahashi, Seiji Katsuoka, Masahiro Hatakeyama | 2023-02-21 |
| 11472000 | Substrate adsorption method, substrate holding apparatus, substrate polishing apparatus, elastic film, substrate adsorption determination method for substrate holding apparatus, and pressure control method for substrate holding apparatus | Makoto Fukushima, Osamu Nabeya | 2022-10-18 |
| 11472002 | Substrate polishing apparatus | Hiroshi Aono, Tadakazu Sone, Kenji Shinkai, Hideo Aizawa | 2022-10-18 |
| 11426834 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi +5 more | 2022-08-30 |
| D954567 | Measurement jig | — | 2022-06-14 |
| 11325224 | Method of monitoring a dressing process and polishing apparatus | — | 2022-05-10 |
| 11065734 | Film thickness measuring device and polishing device | — | 2021-07-20 |
| 10926374 | Substrate processing apparatus | Shuichi Kamata, Koichi Takeda, Ryuichi Kosuge | 2021-02-23 |
| 10870183 | Substrate processing apparatus | — | 2020-12-22 |
| 10777417 | Dressing device, polishing apparatus, holder, housing and dressing method | — | 2020-09-15 |
| 10688620 | Polishing apparatus | Yuta Suzuki, Taro Takahashi, Seiji Katsuoka, Masahiro Hatakeyama | 2020-06-23 |
| 10675731 | Method of monitoring a dressing process and polishing apparatus | — | 2020-06-09 |
| 10661409 | Substrate cleaning apparatus, substrate processing apparatus, and substrate cleaning method | — | 2020-05-26 |
| 10636665 | Dressing device, polishing apparatus, holder, housing and dressing method | — | 2020-04-28 |
| 10625395 | Substrate polishing apparatus | — | 2020-04-21 |
| 10576604 | Substrate polishing apparatus | Hiroshi Aono, Tadakazu Sone, Kenji Shinkai, Hideo Aizawa | 2020-03-03 |
| 10537975 | Substrate adsorption method, substrate holding apparatus, substrate polishing apparatus, elastic film, substrate adsorption determination method for substrate holding apparatus, and pressure control method for substrate holding apparatus | Makoto Fukushima, Osamu Nabeya | 2020-01-21 |
| 10486285 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi +5 more | 2019-11-26 |
| 10442054 | Coupling mechanism, substrate polishing apparatus, method of determining position of rotational center of coupling mechanism, program of determining position of rotational center of coupling mechanism, method of determining maximum pressing load of rotating body, and program of determining maximum pressing load of rotating body | — | 2019-10-15 |
| 10170345 | Substrate processing apparatus | Yutaka Kobayashi | 2019-01-01 |