Issued Patents All Time
Showing 26–50 of 92 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10086495 | Dresser disk cleaning brush, cleaning apparatus, and cleaning method | — | 2018-10-02 |
| 10029343 | Polishing apparatus | — | 2018-07-24 |
| 10032656 | Substrate processing apparatus | — | 2018-07-24 |
| 10016871 | Polishing apparatus and controlling the same | — | 2018-07-10 |
| 9962804 | Polishing apparatus, method for controlling the same, and method for outputting a dressing condition | — | 2018-05-08 |
| 9943943 | Method and apparatus for monitoring a polishing surface of a polishing pad used in polishing apparatus | Takahiro SHIMANO, Akira Imamura, Akira Nakamura | 2018-04-17 |
| 9908212 | Polishing table replacement apparatus, polishing table replacement method, and apparatus for replacing a component of semiconductor-device manufacturing machine | Shuichi Suemasa, Yutaka Kobayashi | 2018-03-06 |
| 9849557 | Coupling mechanism, substrate polishing apparatus, method of determining position of rotational center of coupling mechanism, program of determining position of rotational center of coupling mechanism, method of determining maximum pressing load of rotating body, and program of determining maximum pressing load of rotating body | — | 2017-12-26 |
| 9808908 | Method of monitoring a dressing process and polishing apparatus | — | 2017-11-07 |
| 9757838 | Polishing apparatus having end point detecting apparatus detecting polishing end point on basis of current and sliding friction | — | 2017-09-12 |
| 9707661 | Polishing method and polishing apparatus | — | 2017-07-18 |
| 9687958 | Wet treatment apparatus and substrate treatment apparatus provided with the same | — | 2017-06-27 |
| 9687957 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi +5 more | 2017-06-27 |
| 9666469 | Lifting device, substrate processing apparatus having lifting device, and unit transferring method | Kenji Shinkai, Tadakazu Sone, Hideo Aizawa, Hiroshi Aono, Toshio Yokoyama | 2017-05-30 |
| 9662761 | Polishing apparatus | Nobuyuki Takahashi, Toru Maruyama, Suguru Sakugawa, Osamu Nabeya | 2017-05-30 |
| 9616545 | Exhaust flow rate control apparatus and substrate processing apparatus provided therewith | — | 2017-04-11 |
| 9550268 | Substrate holding apparatus and polishing apparatus | — | 2017-01-24 |
| 9539699 | Polishing method | — | 2017-01-10 |
| 9511476 | Dresser disk cleaning brush, cleaning apparatus, and cleaning method | — | 2016-12-06 |
| D764124 | Brush for cleaning semiconductor polishing disk | — | 2016-08-16 |
| D760455 | Brush for cleaning semiconductor polishing disk | — | 2016-06-28 |
| 9358662 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi +5 more | 2016-06-07 |
| 9362129 | Polishing apparatus and polishing method | Mitsuru Miyazaki, Kenichi Kobayashi, Teruaki HOMBO, Akira Imamura, Boyu DONG | 2016-06-07 |
| D753736 | Dresser disk | — | 2016-04-12 |
| 9302366 | Method and apparatus for monitoring a polishing surface of a polishing pad used in polishing apparatus | Takahiro SHIMANO, Akira Imamura, Akira Nakamura | 2016-04-05 |