Issued Patents All Time
Showing 76–92 of 92 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6373159 | Substrate rotating apparatus | — | 2002-04-16 |
| 6366039 | Excimer laser device | Shinichi Sekiguchi, Toshimitsu Barada, Toshiharu Nakazawa | 2002-04-02 |
| 6346757 | Magnetic bearing controller | — | 2002-02-12 |
| 6326712 | Magnetic bearing device | Toshiharu Nakazawa, Toshimitsu Barada, Atsushi Ooyama, Masafumi Inoue, Shinichi Sekiguchi | 2001-12-04 |
| 6321463 | Substrate treating apparatus and method of operating the same | — | 2001-11-27 |
| 6269548 | Spin processing apparatus | Junichiro Yoshioka, Kazuaki Maeda, Akihisa Hongo | 2001-08-07 |
| 6176929 | Thin-film deposition apparatus | Yukio Fukunaga, Kiwamu Tsukamoto, Mitsunao Shibasaki, Kuniaki Horie, Hiroyuki Ueyama +1 more | 2001-01-23 |
| 6022413 | Thin-film vapor deposition apparatus | Yukio Fukunaga, Takeshi Murakami, Kiwamu Tsukamoto | 2000-02-08 |
| 5950925 | Reactant gas ejector head | Yukio Fukunaga, Kiwamu Tsukamoto, Masao Saitoh | 1999-09-14 |
| 5950646 | Vapor feed supply system | Kuniaki Horie, Hidenao Suzuki, Tsutomu Nakada, Takeshi Murakami, Yukio Fukunaga +5 more | 1999-09-14 |
| 5935337 | Thin-film vapor deposition apparatus | Noriyuki Takeuchi, Takeshi Murakami, Kiwamu Tsukamoto, Masaru Nakaniwa, Naoki Matsuda | 1999-08-10 |
| 5757148 | Method of and apparatus for stopping a motor having magnetic bearings | Hironobu Yamasaki, Kazunari Nasa | 1998-05-26 |
| 5728223 | Reactant gas ejector head and thin-film vapor deposition apparatus | Takeshi Murakami, Noriyuki Takeuchi, Kiwamu Tsukamoto, Yukio Fukunaga, Akihisa Hongo | 1998-03-17 |
| 5729736 | Access analysis method and system in parallel data base system | Fumio Gomi, Kazutoshi Amano, Tomohiro Sakaue, Masahiko Hashimoto, Takafumi NOGAMI +2 more | 1998-03-17 |
| 5641054 | Magnetic levitation conveyor apparatus | Satoshi Mori, Masao Matsumura, Yoichi Kanemitsu, Takeshi Yoshioka, Masaaki Kajiyama +9 more | 1997-06-24 |
| 5601027 | Positioning system with damped magnetic attraction stopping assembly | Fumio Kondo, Satoshi Mori, Masao Matsumura, Takeshi Yoshioka | 1997-02-11 |
| 5397212 | Robot with dust-free and maintenance-free actuators | Katsuhide Watanabe, Yoichi Kanemitsu, Naoji Hiraki, Shinichi Moriyama | 1995-03-14 |