Issued Patents All Time
Showing 1–25 of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8205625 | Apparatus and method for surface treatment of substrate, and substrate processing apparatus and method | Hideki Tateishi, Tsutomu Nakada, Akira Susaki, Shohei Shima | 2012-06-26 |
| 7498261 | Method and apparatus for forming metal film | Xinming Wang, Daisuke Takagi, Akihiko Tashiro, Akira Fukunaga, Akira Owatari | 2009-03-03 |
| 7374584 | Interconnects forming method and interconnects forming apparatus | Xinming Wang, Daisuke Takagi, Akihiko Tashiro, Akira Fukunaga | 2008-05-20 |
| 7285492 | Method for processing substrate | Xinming Wang, Daisuke Takagi, Akihiko Tashiro, Akira Fukunaga, Akira Owatari +2 more | 2007-10-23 |
| 7217653 | Interconnects forming method and interconnects forming apparatus | Xinming Wang, Daisuke Takagi, Akihiko Tashiro, Akira Fukunaga | 2007-05-15 |
| 6419462 | Positive displacement type liquid-delivery apparatus | Kuniaki Horie, Akihisa Hongo, Kiwamu Tsukamoto, Kenji Kamoda, Hirotake Yamagishi +1 more | 2002-07-16 |
| 6387182 | Apparatus and method for processing substrate | Kuniaki Horie, Naoaki Ogure, Tsutomu Nakada, Masahito Abe, Mitsunao Shibasaki +3 more | 2002-05-14 |
| 6176929 | Thin-film deposition apparatus | Hiroyuki Shinozaki, Kiwamu Tsukamoto, Mitsunao Shibasaki, Kuniaki Horie, Hiroyuki Ueyama +1 more | 2001-01-23 |
| 6036783 | Liquid material vaporizer apparatus and gas ejection device | Takeshi Murakami, Naoaki Ogure, Akihisa Hongo | 2000-03-14 |
| 6022413 | Thin-film vapor deposition apparatus | Hiroyuki Shinozaki, Takeshi Murakami, Kiwamu Tsukamoto | 2000-02-08 |
| 5950646 | Vapor feed supply system | Kuniaki Horie, Hidenao Suzuki, Tsutomu Nakada, Takeshi Murakami, Masahito Abe +5 more | 1999-09-14 |
| 5950925 | Reactant gas ejector head | Hiroyuki Shinozaki, Kiwamu Tsukamoto, Masao Saitoh | 1999-09-14 |
| 5862605 | Vaporizer apparatus | Kuniaki Horie, Naoaki Ogure, Akihisa Hongo | 1999-01-26 |
| 5728223 | Reactant gas ejector head and thin-film vapor deposition apparatus | Takeshi Murakami, Noriyuki Takeuchi, Hiroyuki Shinozaki, Kiwamu Tsukamoto, Akihisa Hongo | 1998-03-17 |
| 5114177 | Anti-rolling controlling system for automotive active suspension system with road friction dependent variable control characteristics | Naoto Fukushima, Yohsuke Akatsu, Itaru Fujimura, Masaharu Satoh | 1992-05-19 |
| 5085459 | Pressure supply network for active suspension system and control therefor | Masaharu Sato, Naoto Fukushima, Yohsuke Akatsu, Itaru Fujimura, Kensuke Fukuyama | 1992-02-04 |
| 5083811 | Fluid supply circuit for active suspension system with variable fluid source discharge rate depending upon magnitude of lateral acceleration | Masaharu Sato, Naoto Fukushima, Yohsuke Akatsu, Itaru Fujimura, Kensuke Fukuyama | 1992-01-28 |
| 5062660 | Pressure medium fluid circuit for active suspension system with variable fluid source discharge rate depending upon magnitude of stroke in relative displacement between vehicular body and suspension member | Masaharu Satoh, Naoto Fukushima, Yohsuke Akatsu, Itaru Fujimura, Kensuke Fukuyama | 1991-11-05 |
| 5056811 | Actively controlled automotive suspension system with mutually independent hydraulic systems having mutually different damping characteristics for improving response characteristics in active suspension control | Naoto Fukushima, Yohsuke Akatsu, Sunao Hano | 1991-10-15 |
| 5053965 | Attitude change suppressive vehicular height regulation system | Itaru Fujimura, Naoto Fukushima, Yohsuke Akatsu, Masaharu Sato | 1991-10-01 |
| 5040115 | System for monitoring vehicle slip angle | Naoto Fukushima, Yohsuke Akatsu, Itaru Fujimura, Masaharu Satoh | 1991-08-13 |
| 5016907 | Anti-rolling control system for automotive active suspension system | Yohsuke Akatsu, Naoto Fukushima, Itaru Fujimura | 1991-05-21 |
| 5013061 | Hydraulic circuit for actively controlled automotive suspension system with fail-safe system | Itaru Fujimura, Naoto Fukushima, Yohsuke Akatsu | 1991-05-07 |
| 4982979 | Active suspension system with enhanced response characteristics hydraulic circuit | Yohsuke Akatsu, Naoto Fukushima, Itaru Fujimura, Masaharu Satoh, Kensuke Fukuyama +2 more | 1991-01-08 |
| 4967360 | Actively controlled suspension system with power supply control | Naoto Fukushima, Yohsuke Akatsu, Sunao Hano, Masaharu Sato | 1990-10-30 |