MS

Mitsunao Shibasaki

EB Ebara: 5 patents #423 of 1,611Top 30%
Overall (All Time): #1,044,151 of 4,157,543Top 30%
5
Patents All Time

Issued Patents All Time

Showing 1–5 of 5 patents

Patent #TitleCo-InventorsDate
6387182 Apparatus and method for processing substrate Kuniaki Horie, Yukio Fukunaga, Naoaki Ogure, Tsutomu Nakada, Masahito Abe +3 more 2002-05-14
6176929 Thin-film deposition apparatus Yukio Fukunaga, Hiroyuki Shinozaki, Kiwamu Tsukamoto, Kuniaki Horie, Hiroyuki Ueyama +1 more 2001-01-23
5950646 Vapor feed supply system Kuniaki Horie, Hidenao Suzuki, Tsutomu Nakada, Takeshi Murakami, Yukio Fukunaga +5 more 1999-09-14
5904301 Spraying device Masaaki Kajiyama 1999-05-18
5829156 Spin dryer apparatus Naoaki Ogure 1998-11-03