Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6387182 | Apparatus and method for processing substrate | Kuniaki Horie, Yukio Fukunaga, Naoaki Ogure, Tsutomu Nakada, Masahito Abe +3 more | 2002-05-14 |
| 6176929 | Thin-film deposition apparatus | Yukio Fukunaga, Hiroyuki Shinozaki, Kiwamu Tsukamoto, Kuniaki Horie, Hiroyuki Ueyama +1 more | 2001-01-23 |
| 5950646 | Vapor feed supply system | Kuniaki Horie, Hidenao Suzuki, Tsutomu Nakada, Takeshi Murakami, Yukio Fukunaga +5 more | 1999-09-14 |
| 5904301 | Spraying device | Masaaki Kajiyama | 1999-05-18 |
| 5829156 | Spin dryer apparatus | Naoaki Ogure | 1998-11-03 |