Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5904301 | Spraying device | Mitsunao Shibasaki | 1999-05-18 |
| 5852298 | Micro-processing apparatus and method therefor | Masahiro Hatakeyama, Katsunori Ichiki, Takao Kato, Takashi Tsuzuki, Yotaro Hatamura +1 more | 1998-12-22 |
| 5641054 | Magnetic levitation conveyor apparatus | Satoshi Mori, Masao Matsumura, Yoichi Kanemitsu, Takeshi Yoshioka, Fumio Kondo +9 more | 1997-06-24 |
| 5515618 | Substrate transportation system | Masao Matsumura, Takeshi Yoshioka | 1996-05-14 |
| 5398481 | Vacuum processing system | Noriyuki Takeuchi, Fumio Kondo, Masao Matsumura, Takeshi Yoshioka | 1995-03-21 |