Issued Patents All Time
Showing 25 most recent of 97 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11946470 | Information processing apparatus, information processing system, information processing method, program, substrate processing apparatus, criterion data determination apparatus, and criterion data determination method | Keiji Maishigi, Tetsuro Sugiura, Katsuaki Usui, Chikako Honma, Toru Osuga +2 more | 2024-04-02 |
| 11607769 | Polishing apparatus of substrate | Tetsuji Togawa, Hiroshi Sobukawa | 2023-03-21 |
| 11597051 | Method for polishing substrate including functional chip | Tetsuji Togawa, Hiroshi Sobukawa | 2023-03-07 |
| 11583973 | Polishing apparatus | Hiroyuki Shinozaki, Yuta Suzuki, Taro Takahashi, Seiji Katsuoka | 2023-02-21 |
| 10688620 | Polishing apparatus | Hiroyuki Shinozaki, Yuta Suzuki, Taro Takahashi, Seiji Katsuoka | 2020-06-23 |
| 10446404 | Electron-beam irradiated area adjustment method and adjustment system, electron-beam irradiated region correction method, and electron beam irradiation apparatus | Ryo Tajima, Kenichi Suematsu, Kiwamu Tsukamoto, Kenji Watanabe, Shoji Yoshikawa +2 more | 2019-10-15 |
| 10157722 | Inspection device | Shoji Yoshikawa, Takeshi Murakami, Kenji Watanabe, Yoshihiko Naito, Yasushi Toma +5 more | 2018-12-18 |
| 10002740 | Inspection device | Ryo Tajima, Kenichi Suematsu, Kenji Watanabe, Yasushi Toma, Kenji Terao +1 more | 2018-06-19 |
| 9966227 | Specimen observation method and device using secondary emission electron and mirror electron detection | Takeshi Murakami, Yoshihiko Naito, Kenji Terao, Norio Kimura, Kenji Watanabe | 2018-05-08 |
| 9852878 | Surface processing apparatus | Kenichi Suematsu, Ryo Tajima, Kiwamu Tsukamoto, Kenji Terao, Shoji Yoshikawa | 2017-12-26 |
| 9728374 | Inspection apparatus | Takehide Hayashi, Shinji Yamaguchi, Masato Naka | 2017-08-08 |
| 9601302 | Inspection apparatus | Shoji Yoshikawa, Kiwamu Tsukamoto, Takeshi Murakami, Tsutomu Karimata | 2017-03-21 |
| 9406480 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus | Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Toshifumi Kimba, Shoji Yoshikawa +7 more | 2016-08-02 |
| 9368322 | Inspection apparatus | Takehide Hayashi, Shinji Yamaguchi, Masato Naka | 2016-06-14 |
| 9368314 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Hirosi Sobukawa +9 more | 2016-06-14 |
| 9194826 | Electron beam apparatus and sample observation method using the same | Toru Kaga, Kenji Terao, Kenji Watanabe, Yoshihiko Naito, Takeshi Murakami +1 more | 2015-11-24 |
| 9134261 | Inspection apparatus | Shoji Yoshikawa, Kiwamu Tsukamoto, Takeshi Murakami, Tsutomu Karimata | 2015-09-15 |
| 9105444 | Electro-optical inspection apparatus and method with dust or particle collection function | Kenji Watanabe, Yoshihiko Naito, Tatsuya Kohama, Kenji Terao, Takeshi Murakami +4 more | 2015-08-11 |
| 9074994 | Inspection method and apparatus of a glass substrate for imprint | Norio Kimura | 2015-07-07 |
| 8946629 | Inspection apparatus | Yasushi Toma, Shoji Yoshikawa, Kiwamu Tsukamoto | 2015-02-03 |
| 8946631 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus | Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Toshifumi Kimba, Shoji Yoshikawa +7 more | 2015-02-03 |
| 8937283 | Specimen observation method and device using secondary emission electron and mirror electron detection | Takeshi Murakami, Yoshihiko Naito, Kenji Terao, Norio Kimura, Kenji Watanabe | 2015-01-20 |
| 8884225 | Sample observing device and sample observing method | Tsutomu Karimata, Tatsuya Kohama, Shoji Yoshikawa | 2014-11-11 |
| 8859984 | Method and apparatus for inspecting sample surface | Nobuharu Noji, Yoshihiko Naito, Hirosi Sobukawa, Kenji Terao, Katsuya Okumura | 2014-10-14 |
| 8822919 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Toshifumi Kimba, Tohru Satake, Tsutomu Karimata, Kenji Watanabe, Nobuharu Noji +6 more | 2014-09-02 |