Issued Patents All Time
Showing 26–50 of 97 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8803103 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Hirosi Sobukawa +9 more | 2014-08-12 |
| 8796621 | Detector and inspecting apparatus | Shoji Yoshikawa, Kenichi Suematsu, Tsutomu Karimata, Nobuharu Noji | 2014-08-05 |
| 8742344 | Inspection apparatus | Yasushi Toma, Shoji Yoshikawa, Kiwamu Tsukamoto | 2014-06-03 |
| 8742341 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus | Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Toshifumi Kimba, Shoji Yoshikawa +7 more | 2014-06-03 |
| 8674317 | Sample surface inspection apparatus and method | Kenji Watanabe, Takeshi Murakami, Tohru Satake, Nobuharu Noji | 2014-03-18 |
| 8624182 | Electro-optical inspection apparatus and method with dust or particle collection function | Kenji Watanabe, Yoshihiko Naito, Tatsuya Kohama, Kenji Terao, Takeshi Murakami +4 more | 2014-01-07 |
| 8525127 | Method and apparatus for inspecting sample surface | Nobuharu Noji, Yoshihiko Naito, Hirosi Sobukawa, Kenji Terao, Katsuya Okumura | 2013-09-03 |
| 8497476 | Inspection device | Shoji Yoshikawa, Takeshi Murakami, Kenji Watanabe, Yoshihiko Naito, Yasushi Toma +5 more | 2013-07-30 |
| 8431892 | Detector and inspecting apparatus | Shoji Yoshikawa, Kenichi Suematsu, Tsutomu Karimata, Nobuharu Noji | 2013-04-30 |
| 8368018 | Method and apparatus for charged particle beam inspection | Takumi Ota | 2013-02-05 |
| 8368031 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Hirosi Sobukawa +9 more | 2013-02-05 |
| 8274047 | Substrate surface inspection method and inspection apparatus | Yoshihiko Naito, Norio Kimura, Kenji Terao, Masamitsu Itoh | 2012-09-25 |
| 8124933 | Mapping-projection-type electron beam apparatus for inspecting sample by using electrons emitted from the sample | Kenji Watanabe, Takeshi Murakami, Yoshinao Hirabayashi, Tohru Satake, Nobuhara Noji +2 more | 2012-02-28 |
| 8076654 | Sample surface inspection apparatus and method | Kenji Watanabe, Takeshi Murakami, Tohru Satake, Nobuharu Noji | 2011-12-13 |
| 8053726 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Hirosi Sobukawa +9 more | 2011-11-08 |
| 8013315 | Charged particle beam apparatus, method of adjusting astigmatism using same and method of manufacturing device using same | Kenji Watanabe, Takeshi Murakami, Ryo Tajima, Masatoshi Tsuneoka, Nobuharu Noji | 2011-09-06 |
| 7952071 | Apparatus and method for inspecting sample surface | Nobuharu Noji, Yoshihiko Naito, Hirosi Sobukawa, Kenji Terao, Takeshi Murakami +2 more | 2011-05-31 |
| 7928378 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Toshifumi Kimba, Tohru Satake, Tsutomu Karimata, Kenji Watanabe, Nobuharu Noji +6 more | 2011-04-19 |
| 7928382 | Detector and inspecting apparatus | Shoji Yoshikawa, Kenichi Suematsu, Tsutomu Karimata, Nobuharu Noji | 2011-04-19 |
| 7888642 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Nabuharu Noji, Tohru Satake, Kenji Watanabe, Takao Kato +7 more | 2011-02-15 |
| 7863580 | Electron beam apparatus and an aberration correction optical apparatus | Takeshi Murakami, Nobuharu Noji, Mamoru Nakasuji, Hirosi Sobukawa, Satoshi Mori +3 more | 2011-01-04 |
| 7829853 | Sample surface observation method | Kenji Watanabe, Yoshihiko Naito, Kenji Terao | 2010-11-09 |
| 7741601 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus | Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Toshifumi Kimba, Shoji Yoshikawa +7 more | 2010-06-22 |
| 7592586 | Mapping-projection-type electron beam apparatus for inspecting sample by using electrons reflected from the sample | Kenji Watanabe, Takeshi Murakami, Yoshinao Hirabayashi, Tohru Satake, Nobuharu Noji +2 more | 2009-09-22 |
| 7569838 | Electron beam inspection system and inspection method and method of manufacturing devices using the system | Kenji Watanabe, Hirosi Sobukawa, Nobuharu Noji, Tohru Satake, Shoji Yoshikawa +7 more | 2009-08-04 |