| 12243710 |
Electron beam irradiation apparatus with overlapping beam columns and helping columns |
— |
2025-03-04 |
| 11515118 |
Electron beam irradiation apparatus and electron beam alignment method |
Kenji Watanabe, Shinichi Okada, Tsutomu Karimata |
2022-11-29 |
| 11217421 |
Adjustment method and electron beam device |
Takehide Hayashi, Tatsuya Kohama, Kenji Watanabe, Tsutomu Karimata |
2022-01-04 |
| 10707048 |
Deflection sensitivity calculation method and deflection sensitivity calculation system |
— |
2020-07-07 |
| 10446404 |
Electron-beam irradiated area adjustment method and adjustment system, electron-beam irradiated region correction method, and electron beam irradiation apparatus |
Masahiro Hatakeyama, Kenichi Suematsu, Kiwamu Tsukamoto, Kenji Watanabe, Shoji Yoshikawa +2 more |
2019-10-15 |
| 10002740 |
Inspection device |
Masahiro Hatakeyama, Kenichi Suematsu, Kenji Watanabe, Yasushi Toma, Kenji Terao +1 more |
2018-06-19 |
| 9852878 |
Surface processing apparatus |
Masahiro Hatakeyama, Kenichi Suematsu, Kiwamu Tsukamoto, Kenji Terao, Shoji Yoshikawa |
2017-12-26 |
| 9406480 |
Testing apparatus using charged particles and device manufacturing method using the testing apparatus |
Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Toshifumi Kimba, Masahiro Hatakeyama +7 more |
2016-08-02 |
| 9105445 |
Inspection system, inspection image data generation method, inspection display unit, defect determination method, and storage medium on which inspection display program is recorded |
Kenichi Suematsu, Shoji Yoshikawa |
2015-08-11 |
| 8946631 |
Testing apparatus using charged particles and device manufacturing method using the testing apparatus |
Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Toshifumi Kimba, Masahiro Hatakeyama +7 more |
2015-02-03 |
| 8742341 |
Testing apparatus using charged particles and device manufacturing method using the testing apparatus |
Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Toshifumi Kimba, Masahiro Hatakeyama +7 more |
2014-06-03 |
| 8256362 |
Embroidery sewing machine and control method therefor |
Shoji Kato |
2012-09-04 |
| 8013315 |
Charged particle beam apparatus, method of adjusting astigmatism using same and method of manufacturing device using same |
Kenji Watanabe, Takeshi Murakami, Masahiro Hatakeyama, Masatoshi Tsuneoka, Nobuharu Noji |
2011-09-06 |
| 7934461 |
Sewing machine capable of sewing sequins and method for setting sequin feed amount therefor |
— |
2011-05-03 |
| 7741601 |
Testing apparatus using charged particles and device manufacturing method using the testing apparatus |
Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Toshifumi Kimba, Masahiro Hatakeyama +7 more |
2010-06-22 |
| 7365324 |
Testing apparatus using charged particles and device manufacturing method using the testing apparatus |
Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Toshifumi Kimba, Masahiro Hatakeyama +7 more |
2008-04-29 |
| 7138629 |
Testing apparatus using charged particles and device manufacturing method using the testing apparatus |
Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Toshifumi Kimba, Masahiro Hatakeyama +7 more |
2006-11-21 |