Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11217421 | Adjustment method and electron beam device | Takehide Hayashi, Ryo Tajima, Kenji Watanabe, Tsutomu Karimata | 2022-01-04 |
| 10157722 | Inspection device | Masahiro Hatakeyama, Shoji Yoshikawa, Takeshi Murakami, Kenji Watanabe, Yoshihiko Naito +5 more | 2018-12-18 |
| 9105444 | Electro-optical inspection apparatus and method with dust or particle collection function | Kenji Watanabe, Masahiro Hatakeyama, Yoshihiko Naito, Kenji Terao, Takeshi Murakami +4 more | 2015-08-11 |
| 8884225 | Sample observing device and sample observing method | Tsutomu Karimata, Shoji Yoshikawa, Masahiro Hatakeyama | 2014-11-11 |
| 8624182 | Electro-optical inspection apparatus and method with dust or particle collection function | Kenji Watanabe, Masahiro Hatakeyama, Yoshihiko Naito, Kenji Terao, Takeshi Murakami +4 more | 2014-01-07 |
| 8497476 | Inspection device | Masahiro Hatakeyama, Shoji Yoshikawa, Takeshi Murakami, Kenji Watanabe, Yoshihiko Naito +5 more | 2013-07-30 |
| 7960188 | Polishing method | Shinrou Ohta, Mitsuo Tada, Noburu Shimizu, Yoichi Kobayashi, Taro Takahashi +3 more | 2011-06-14 |
| 7077730 | Method and apparatus for polishing a workpiece | Yukiko Nishioka, Yoshikazu Ariga | 2006-07-18 |
| 6663469 | Polishing method and apparatus | Norio Kimura | 2003-12-16 |