Issued Patents All Time
Showing 1–25 of 83 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11260996 | Lunar orbiting satellite system, and ground station of lunar orbiting satellite system | Naoki Imamura, Kenro Mitsuda, Kazushi Sekine, Kana Tsuneishi, Mitsuhiro Yamazumi | 2022-03-01 |
| 10446404 | Electron-beam irradiated area adjustment method and adjustment system, electron-beam irradiated region correction method, and electron beam irradiation apparatus | Ryo Tajima, Masahiro Hatakeyama, Kenichi Suematsu, Kiwamu Tsukamoto, Kenji Watanabe +2 more | 2019-10-15 |
| 10157722 | Inspection device | Masahiro Hatakeyama, Takeshi Murakami, Kenji Watanabe, Yoshihiko Naito, Yasushi Toma +5 more | 2018-12-18 |
| 10074510 | Inspection system and inspection image data generation method | Kenichi Suematsu | 2018-09-11 |
| 9852878 | Surface processing apparatus | Masahiro Hatakeyama, Kenichi Suematsu, Ryo Tajima, Kiwamu Tsukamoto, Kenji Terao | 2017-12-26 |
| 9601302 | Inspection apparatus | Kiwamu Tsukamoto, Takeshi Murakami, Masahiro Hatakeyama, Tsutomu Karimata | 2017-03-21 |
| 9406480 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus | Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Toshifumi Kimba, Masahiro Hatakeyama +7 more | 2016-08-02 |
| 9368314 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba +9 more | 2016-06-14 |
| 9134261 | Inspection apparatus | Kiwamu Tsukamoto, Takeshi Murakami, Masahiro Hatakeyama, Tsutomu Karimata | 2015-09-15 |
| 9105445 | Inspection system, inspection image data generation method, inspection display unit, defect determination method, and storage medium on which inspection display program is recorded | Ryo Tajima, Kenichi Suematsu | 2015-08-11 |
| 8946629 | Inspection apparatus | Masahiro Hatakeyama, Yasushi Toma, Kiwamu Tsukamoto | 2015-02-03 |
| 8946631 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus | Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Toshifumi Kimba, Masahiro Hatakeyama +7 more | 2015-02-03 |
| 8884225 | Sample observing device and sample observing method | Tsutomu Karimata, Tatsuya Kohama, Masahiro Hatakeyama | 2014-11-11 |
| 8822919 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Toshifumi Kimba, Tohru Satake, Tsutomu Karimata, Kenji Watanabe, Nobuharu Noji +6 more | 2014-09-02 |
| 8803103 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba +9 more | 2014-08-12 |
| 8796621 | Detector and inspecting apparatus | Masahiro Hatakeyama, Kenichi Suematsu, Tsutomu Karimata, Nobuharu Noji | 2014-08-05 |
| 8742344 | Inspection apparatus | Masahiro Hatakeyama, Yasushi Toma, Kiwamu Tsukamoto | 2014-06-03 |
| 8742341 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus | Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Toshifumi Kimba, Masahiro Hatakeyama +7 more | 2014-06-03 |
| 8497476 | Inspection device | Masahiro Hatakeyama, Takeshi Murakami, Kenji Watanabe, Yoshihiko Naito, Yasushi Toma +5 more | 2013-07-30 |
| 8431892 | Detector and inspecting apparatus | Masahiro Hatakeyama, Kenichi Suematsu, Tsutomu Karimata, Nobuharu Noji | 2013-04-30 |
| 8368031 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba +9 more | 2013-02-05 |
| 8053726 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba +9 more | 2011-11-08 |
| 7928382 | Detector and inspecting apparatus | Masahiro Hatakeyama, Kenichi Suematsu, Tsutomu Karimata, Nobuharu Noji | 2011-04-19 |
| 7928378 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Toshifumi Kimba, Tohru Satake, Tsutomu Karimata, Kenji Watanabe, Nobuharu Noji +6 more | 2011-04-19 |
| 7888642 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Nabuharu Noji, Tohru Satake, Masahiro Hatakeyama, Kenji Watanabe +7 more | 2011-02-15 |