Issued Patents All Time
Showing 1–25 of 73 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11951588 | Optical film-thickness measuring apparatus and polishing apparatus | Masaki Kinoshita, Yoshikazu Kato, Yoichi Shiokawa | 2024-04-09 |
| 11911867 | Polishing apparatus and polishing method | Masaki Kinoshita, Yoichi Shiokawa | 2024-02-27 |
| 11612982 | Polishing method and polishing apparatus | — | 2023-03-28 |
| 11413720 | Polishing apparatus | Nobuyuki Takahashi, Masaki Kinoshita | 2022-08-16 |
| 11045921 | Polishing apparatus and polishing method | Masaki Kinoshita | 2021-06-29 |
| 10816323 | Film-thickness measuring apparatus, polishing apparatus, and polishing method | — | 2020-10-27 |
| 10663287 | Polishing apparatus | Nobuyuki Takahashi, Masaki Kinoshita | 2020-05-26 |
| 10343255 | Polishing apparatus | Itsuki Kobata, Yoichi Kobayashi, Katsutoshi Ono, Masaki Kinoshita | 2019-07-09 |
| 10256104 | Film thickness measuring method, film thickness measuring apparatus, polishing method, and polishing apparatus | — | 2019-04-09 |
| 10124462 | Polishing apparatus | — | 2018-11-13 |
| 9969048 | Polishing apparatus | Itsuki Kobata, Yoichi Kobayashi, Katsutoshi Ono, Masaki Kinoshita | 2018-05-15 |
| 9842783 | Polishing method and polishing apparatus | — | 2017-12-12 |
| 9604337 | Polishing method | — | 2017-03-28 |
| 9561577 | Polishing method and polishing apparatus | — | 2017-02-07 |
| 9406480 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus | Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Masahiro Hatakeyama, Shoji Yoshikawa +7 more | 2016-08-02 |
| 9401293 | Polishing apparatus and polishing method | Itsuki Kobata, Yoichi Kobayashi, Katsutoshi Ono, Masaki Kinoshita | 2016-07-26 |
| 9368314 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Hirosi Sobukawa +9 more | 2016-06-14 |
| 9266214 | Polishing method and polishing apparatus | — | 2016-02-23 |
| 9136091 | Electron beam apparatus for inspecting a pattern on a sample using multiple electron beams | Keisuke Mizuuchi | 2015-09-15 |
| D731448 | Polishing pad for substrate polishing apparatus | Masaki Kinoshita | 2015-06-09 |
| 8946631 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus | Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Masahiro Hatakeyama, Shoji Yoshikawa +7 more | 2015-02-03 |
| 8822919 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Tohru Satake, Tsutomu Karimata, Kenji Watanabe, Nobuharu Noji, Takeshi Murakami +6 more | 2014-09-02 |
| 8803103 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Hirosi Sobukawa +9 more | 2014-08-12 |
| 8771038 | Polishing apparatus | Hiroaki Kusa, Masaki Fujii | 2014-07-08 |
| 8742341 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus | Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Masahiro Hatakeyama, Shoji Yoshikawa +7 more | 2014-06-03 |