Issued Patents All Time
Showing 26–50 of 73 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8687197 | Method of monitoring progress of substrate polishing and polishing apparatus | — | 2014-04-01 |
| 8639463 | Electron beam apparatus for inspecting a pattern on a sample using multiple electron beams | Keisuke Mizuuchi | 2014-01-28 |
| 8585460 | Method of making diagram for use in selection of wavelength of light for polishing endpoint detection, method and apparatus for selecting wavelength of light for polishing endpoint detection, polishing endpoint detection method, polishing endpoint detection apparatus, and polishing monitoring method | Yoichi Kobayashi, Shinrou Ohta, Masaki Kinoshita | 2013-11-19 |
| 8414355 | Substrate processing apparatus | Hiroaki Kusa | 2013-04-09 |
| 8368031 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Hirosi Sobukawa +9 more | 2013-02-05 |
| 8280664 | XY-coordinate compensation apparatus and method in sample pattern inspection apparatus | Keisuke Mizuuchi | 2012-10-02 |
| 8115912 | Polishing end point detection method, polishing end point detection apparatus, and polishing apparatus | — | 2012-02-14 |
| 8067732 | Electron beam apparatus | Mamoru Nakasuji, Takeshi Murakami, Tohru Satake, Tsutomi Karimata, Matsutaro Miyamoto +4 more | 2011-11-29 |
| 8053726 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Hirosi Sobukawa +9 more | 2011-11-08 |
| 8045142 | Polishing end point detection method, polishing end point detection apparatus and polishing apparatus | — | 2011-10-25 |
| 7964844 | Sample inspection apparatus | — | 2011-06-21 |
| 7928378 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Tohru Satake, Tsutomu Karimata, Kenji Watanabe, Nobuharu Noji, Takeshi Murakami +6 more | 2011-04-19 |
| 7888642 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Nabuharu Noji, Tohru Satake, Masahiro Hatakeyama, Kenji Watanabe +7 more | 2011-02-15 |
| 7829871 | Sheet beam-type testing apparatus | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Tsutomu Karimata +3 more | 2010-11-09 |
| 7745784 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Tohru Satake, Kenji Watanabe, Takeshi Murakami, Nobuharu Noji +9 more | 2010-06-29 |
| 7741601 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus | Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Masahiro Hatakeyama, Shoji Yoshikawa +7 more | 2010-06-22 |
| 7675634 | Substrate film thickness measurement method, substrate film thickness measurement apparatus and substrate processing apparatus | Shunsuke Nakai | 2010-03-09 |
| 7601972 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Shoji Yoshikawa +5 more | 2009-10-13 |
| 7439502 | Electron beam apparatus and device production method using the electron beam apparatus | Mamoru Nakasuji, Tohru Satake, Nobuharu Noji, Hirosi Sobukawa, Tsutomu Karimata +6 more | 2008-10-21 |
| 7428064 | Substrate film thickness measurement method, substrate film thickness measurement apparatus and substrate processing apparatus | Shunsuke Nakai | 2008-09-23 |
| 7425703 | Electron beam apparatus, a device manufacturing method using the same apparatus, a pattern evaluation method, a device manufacturing method using the same method, and a resist pattern or processed wafer evaluation method | Mamoru Nakasuji, Tohru Satake, Nobuharu Noji, Takeshi Murakami, Kenji Watanabe +1 more | 2008-09-16 |
| 7423267 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Kenji Watanabe +7 more | 2008-09-09 |
| 7417236 | Sheet beam-type testing apparatus | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Tsutomu Karimata +3 more | 2008-08-26 |
| 7411191 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Hiroshi Sobukawa +9 more | 2008-08-12 |
| 7408175 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Tohru Satake, Tsutomu Karimata, Kenji Watanabe, Nobuharu Noji, Takeshi Murakami +6 more | 2008-08-05 |