| 11607769 |
Polishing apparatus of substrate |
Tetsuji Togawa, Masahiro Hatakeyama |
2023-03-21 |
| 11597051 |
Method for polishing substrate including functional chip |
Tetsuji Togawa, Masahiro Hatakeyama |
2023-03-07 |
| 10995765 |
Magnetic levitated pump |
Ichiju Sato, Toshimitsu Barada, Tomonori Ohashi, Satoshi Mori |
2021-05-04 |
| 9105444 |
Electro-optical inspection apparatus and method with dust or particle collection function |
Kenji Watanabe, Masahiro Hatakeyama, Yoshihiko Naito, Tatsuya Kohama, Kenji Terao +4 more |
2015-08-11 |
| 8624182 |
Electro-optical inspection apparatus and method with dust or particle collection function |
Kenji Watanabe, Masahiro Hatakeyama, Yoshihiko Naito, Tatsuya Kohama, Kenji Terao +4 more |
2014-01-07 |
| 8530869 |
Extreme ultraviolet light source apparatus |
Shinji Nagai, Takanobu Ishihara, Kouji Kakizaki, Takeshi Murakami, Masahiro Inoue |
2013-09-10 |
| 8109744 |
Turbo vacuum pump |
Hiroyuki Kawasaki, Hiroaki Ogamino |
2012-02-07 |
| 8067732 |
Electron beam apparatus |
Mamoru Nakasuji, Takeshi Murakami, Tohru Satake, Tsutomi Karimata, Toshifumi Kimba +4 more |
2011-11-29 |
| 8003963 |
Extreme ultraviolet light source apparatus |
Shinji Nagai, Takanobu Ishihara, Kouji Kakizaki, Takeshi Murakami, Masahiro Inoue |
2011-08-23 |
| 7411191 |
Inspection system by charged particle beam and method of manufacturing devices using the system |
Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba +9 more |
2008-08-12 |
| 7098045 |
Processing method utilizing an apparatus to be sealed against workpiece |
Nobuharu Noji, Masami Nagayama, Koji Ono, Mutsumi Saito |
2006-08-29 |
| 6869890 |
Processing apparatus to be sealed against workpiece |
Nobuharu Noji, Masami Nagayama, Koji Ono, Mutsumi Saito |
2005-03-22 |
| 6589009 |
Turbo-molecular pump |
Atsushi Shiokawa, Matsutaro Miyamoto, Hiroyuki Kawasaki, Hiroaki Ogamino |
2003-07-08 |
| 6585480 |
Turbo-molecular pump |
Hiroyuki Kawasaki |
2003-07-01 |
| 6382249 |
Vacuum exhaust system |
Hiroyuki Kawasaki |
2002-05-07 |
| 6343910 |
Turbo-molecular pump |
Hiroyuki Kawasaki |
2002-02-05 |
| 6220831 |
Turbomolecular pump |
Atsushi Shiokawa, Matsutaro Miyamoto, Toshiharu Nakazawa |
2001-04-24 |
| 6092994 |
Liquid delivery device, method of controlling such liquid delivery device, and liquid delivery pump |
Shigekazu Yamamoto, Tetsuma Ikegami, Shun-ichi Aiyoshizawa, Toshiharu Nakazawa, Yoshinori Ojima |
2000-07-25 |
| 6062810 |
Turbomolecular pump |
Matsutaro Miyamoto, Toshiharu Nakazawa, Atsushi Shiokawa, Junichi Arami |
2000-05-16 |
| RE36610 |
Evacuation apparatus and evacuation method |
Katsuya Okumura, Fumio Kuriyama, Yukio Murai, Manabu Tsujimura |
2000-03-14 |
| 6002659 |
Disk drive device |
Mikio Ogusu, Shinji Ohba |
1999-12-14 |
| 5875168 |
Pickup device for a disk drive device |
Mikio Ogusu, Shinji Ohba |
1999-02-23 |
| 5062271 |
Evacuation apparatus and evacuation method |
Katsuya Okumura, Fumio Kuriyama, Yukio Murai, Manabu Tsujimura |
1991-11-05 |
| 4926648 |
Turbomolecular pump and method of operating the same |
Katsuya Okumura, Fumio Kuriyama, Yukio Murai, Manabu Tsujimura |
1990-05-22 |
