Issued Patents All Time
Showing 1–25 of 72 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12113326 | Laser device and electronic device manufacturing method | Yoichi Sasaki, Hakaru Mizoguchi | 2024-10-08 |
| 11469568 | Laser apparatus and laser processing system | Osamu Wakabayashi | 2022-10-11 |
| 11465233 | Laser processing system and laser processing method | Osamu Wakabayashi | 2022-10-11 |
| 11350515 | Laser system | Hironori IGARASHI, Yohei Kobayashi, Shuntaro Tani | 2022-05-31 |
| 10710194 | Laser processing system and laser processing method | Osamu Wakabayashi | 2020-07-14 |
| 10495890 | Laser system or laser exposure system | Osamu Wakabayashi, Junichi Fujimoto | 2019-12-03 |
| 10306743 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Tatsuya Yanagida, Osamu Wakabayashi, Hakaru Mizoguchi | 2019-05-28 |
| 10251255 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Tatsuya Yanagida, Osamu Wakabayashi, Hakaru Mizoguchi | 2019-04-02 |
| 10177520 | Excimer laser apparatus and excimer laser system | Takeshi Asayama, Osamu Wakabayashi | 2019-01-08 |
| 10117317 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Tatsuya Yanagida, Osamu Wakabayashi, Hakaru Mizoguchi | 2018-10-30 |
| 10103509 | Excimer laser device | Akira SUWA, Osamu Wakabayashi, Hiroshi Umeda | 2018-10-16 |
| 10096966 | Gas laser device and condenser | Akira SUWA, Hiroaki TSUSHIMA, Tomoyuki OHKUBO, Hiroshi Umeda, Hisakazu KATSUUMI | 2018-10-09 |
| 10074958 | Laser system | Osamu Wakabayashi, Masaki Arakawa | 2018-09-11 |
| 10050403 | Excimer laser chamber device | Hisakazu KATSUUMI, Kazuya Takezawa, Hiroaki TSUSHIMA, Takeshi Asayama | 2018-08-14 |
| 9966721 | Laser system | Masaki Arakawa, Kouji Ashikawa, Yasuhiro KAMBA, Akiyoshi Suzuki, Osamu Wakabayashi | 2018-05-08 |
| 9877378 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Tatsuya Yanagida, Osamu Wakabayashi, Hakaru Mizoguchi | 2018-01-23 |
| 9853410 | Gas laser device and control method therefor | Takeshi Asayama, Hiroaki TSUSHIMA, Osamu Wakabayashi | 2017-12-26 |
| 9837780 | Excimer laser apparatus and excimer laser system | Takeshi Asayama, Osamu Wakabayashi | 2017-12-05 |
| 9812841 | Lasersystem | Takashi Onose, Osamu Wakabayashi | 2017-11-07 |
| 9791780 | Exposure apparatus | Takashi Onose, Osamu Wakabayashi, Akiyoshi Suzuki | 2017-10-17 |
| 9748727 | Preliminary ionization discharge device and laser apparatus | Hiroaki TSUSHIMA, Junichi Fujimoto, Natsushi Suzuki, Hisakazu KATSUUMI | 2017-08-29 |
| 9742141 | Laser chamber | Hiroaki TSUSHIMA, Takashi Matsunaga, Takeshi Asayama, Hisakazu KATSUUMI, Hiroshi Umeda +1 more | 2017-08-22 |
| 9722385 | Laser chamber | Hiroyuki Ikeda, Hiroaki TSUSHIMA, Hisakazu KATSUUMI | 2017-08-01 |
| 9601893 | Laser apparatus | Takeshi Asayama, Osamu Wakabayashi | 2017-03-21 |
| 9507248 | Two-beam interference apparatus and two-beam interference exposure system | Shinji Okazaki, Hakaru Mizoguchi, Junichi Fujimoto, Takashi Matsunaga, Osamu Wakabayashi | 2016-11-29 |