Issued Patents All Time
Showing 26–50 of 72 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9497842 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Tatsuya Yanagida, Osamu Wakabayashi, Hakaru Mizoguchi | 2016-11-15 |
| 9429847 | Extreme ultraviolet light source apparatus | Toshihiro Nishisaka, Yukio Watanabe, Osamu Wakabayashi, Michio Shinozaki | 2016-08-30 |
| 9350133 | Method of controlling laser apparatus and laser apparatus | Osamu Wakabayashi, Hiroaki TSUSHIMA | 2016-05-24 |
| 9331450 | Laser apparatus | Takeshi Asayama, Hakaru Mizoguchi, Hiroaki TSUSHIMA, Osamu Wakabayashi, Kazuya Takezawa | 2016-05-03 |
| 9332625 | Extreme ultraviolet light source apparatus | Toshihiro Nishisaka, Yukio Watanabe, Osamu Wakabayashi, Michio Shinozaki | 2016-05-03 |
| 9265136 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Tatsuya Yanagida, Osamu Wakabayashi, Hakaru Mizoguchi | 2016-02-16 |
| 9167678 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Tatsuya Yanagida, Osamu Wakabayashi | 2015-10-20 |
| 9113540 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Tatsuya Yanagida, Osamu Wakabayashi | 2015-08-18 |
| 9093814 | Optical device, and laser chamber and gas laser apparatus using the same | Takahito Kumazaki, Masanori YASHIRO | 2015-07-28 |
| 9052615 | Extreme ultraviolet light source apparatus | Toshihiro Nishisaka, Yukio Watanabe, Osamu Wakabayashi, Michio Shinozaki | 2015-06-09 |
| 8989225 | Laser apparatus | Shinji Okazaki, Osamu Wakabayashi, Takashi Onose, Shinichi Matsumoto | 2015-03-24 |
| 8934510 | Wavelength converter, wavelength converting device, solid state laser device, and laser system | Takashi Onose, Hideo Hoshino | 2015-01-13 |
| 8902948 | Polarization purity control device and gas laser apparatus provided with the same | Shinji Nagai, Fumika Yoshida, Osamu Wakabayashi | 2014-12-02 |
| 8901524 | Extreme ultraviolet light source apparatus | Takeshi Asayama, Akira Endo, Shinji Nagai | 2014-12-02 |
| 8891574 | Polarization purity control device and gas laser apparatus provided with the same | Shinji Nagai, Fumika Yoshida, Osamu Wakabayashi | 2014-11-18 |
| 8855167 | Gas discharge chamber | Shinji Nagai, Fumika Yoshida, Osamu Wakabayashi | 2014-10-07 |
| 8841641 | Extreme ultraviolet light source apparatus | Shinji Nagai, Tatsuya Yanagida | 2014-09-23 |
| 8811438 | Temperature controller for gas laser | Yukio Watanabe, Hideyuki Hayashi, Michio Shinozaki, Hideo Hoshino | 2014-08-19 |
| 8787413 | Temperature controller for gas laser | Yukio Watanabe, Hideyuki Hayashi, Michio Shinozaki, Hideo Hoshino | 2014-07-22 |
| 8710473 | Droplet generation and detection device, and droplet control device | Hakaru Mizoguchi, Osamu Wakabayashi, Masahiro Inoue | 2014-04-29 |
| 8710472 | Target output device and extreme ultraviolet light source apparatus | Takanobu Ishihara, Youichi Sasaki, Masahiro Inoue, Takayuki Yabu, Hideo Hoshino | 2014-04-29 |
| 8698112 | Extreme ultraviolet light generation apparatus | Takayuki Yabu, Takanobu Ishihara, Tamotsu Abe, Osamu Wakabayashi | 2014-04-15 |
| 8586954 | Extreme ultraviolet light source apparatus | Takeshi Asayama, Akira Endo, Shinji Nagai | 2013-11-19 |
| 8569723 | Extreme ultraviolet light source apparatus | Shinji Nagai, Takanobu Ishihara, Tamotsu Abe | 2013-10-29 |
| 8569722 | Extreme ultraviolet light generation apparatus | Tooru Abe, Osamu Wakabayashi | 2013-10-29 |