Issued Patents All Time
Showing 1–25 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11477877 | Laser apparatus for generating extreme ultraviolet light | Hitoshi Nagano, Yasunori Wada, Osamu Wakabayashi | 2022-10-18 |
| 11226565 | Extreme ultraviolet light generating system and electronic device manufacturing method | — | 2022-01-18 |
| 10932350 | Extreme ultraviolet light generation system | Osamu Wakabayashi | 2021-02-23 |
| 10667375 | Extreme ultraviolet light generation method | — | 2020-05-26 |
| 10627287 | Thomson scattering measurement system and EUV light generation system | Kouichiro Kouge | 2020-04-21 |
| 10630042 | System and method for generating extreme ultraviolet light, and laser apparatus | Osamu Wakabayashi | 2020-04-21 |
| 10582601 | Extreme ultraviolet light generating apparatus using differing laser beam diameters | — | 2020-03-03 |
| 10555408 | Extreme ultraviolet light generation system | Osamu Wakabayashi | 2020-02-04 |
| 10512148 | System and method for generating extreme ultraviolet light employing laser pulse including pedestal | Hitoshi Nagano, Yasunori Wada, Osamu Wakabayashi | 2019-12-17 |
| 10306743 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Kouji Kakizaki, Osamu Wakabayashi, Hakaru Mizoguchi | 2019-05-28 |
| 10251255 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Kouji Kakizaki, Osamu Wakabayashi, Hakaru Mizoguchi | 2019-04-02 |
| 10172225 | Extreme ultraviolet light generation apparatus | Toru Suzuki, Tamotsu Abe, Osamu Wakabayashi | 2019-01-01 |
| 10117317 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Kouji Kakizaki, Osamu Wakabayashi, Hakaru Mizoguchi | 2018-10-30 |
| 10074956 | System and method for generating extreme ultraviolet light, and laser apparatus | Osamu Wakabayashi | 2018-09-11 |
| 9986629 | Extreme ultraviolet light generation apparatus | Toru Suzuki, Tamotsu Abe, Osamu Wakabayashi | 2018-05-29 |
| 9980360 | Extreme ultraviolet light generation system | Osamu Wakabayashi | 2018-05-22 |
| 9877378 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Kouji Kakizaki, Osamu Wakabayashi, Hakaru Mizoguchi | 2018-01-23 |
| 9509115 | System and method for generating extreme ultraviolet light, and laser apparatus | Osamu Wakabayashi | 2016-11-29 |
| 9497841 | Extreme ultraviolet light generation system | Osamu Wakabayashi | 2016-11-15 |
| 9497842 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Kouji Kakizaki, Osamu Wakabayashi, Hakaru Mizoguchi | 2016-11-15 |
| 9402297 | Extreme ultraviolet light generation system | Osamu Wakabayashi, Hakaru Mizoguchi | 2016-07-26 |
| 9265136 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Kouji Kakizaki, Osamu Wakabayashi, Hakaru Mizoguchi | 2016-02-16 |
| 9172141 | Antenna, antenna apparatus, and communication apparatus | Shuichiro Yamaguchi, Yasutaka Hieda | 2015-10-27 |
| 9167678 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Kouji Kakizaki, Osamu Wakabayashi | 2015-10-20 |
| 9130345 | System and method for generating extreme ultraviolet light, and laser apparatus | Osamu Wakabayashi | 2015-09-08 |