Issued Patents All Time
Showing 1–25 of 294 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406889 | Electronic device manufacturing method | Toshihiro OGA, Koichi Fujii | 2025-09-02 |
| 12389508 | Light source parameter information management method, light source parameter information management apparatus, and computer readable medium | Yuji MINEGISHI | 2025-08-12 |
| 12300962 | Laser device and electronic device manufacturing method | Takahito Kumazaki | 2025-05-13 |
| 12237640 | Line narrowing device and electronic device manufacturing method | Koichi Fujii | 2025-02-25 |
| 12216409 | Exposure system, laser control parameter production method, and electronic device manufacturing method | Koichi Fujii | 2025-02-04 |
| 12197132 | Exposure system and method for manufacturing electronic devices | Koichi Fujii | 2025-01-14 |
| 12160085 | Laser system and electronic device manufacturing method | Taisuke Miura, Takashi Onose | 2024-12-03 |
| 12111577 | Line narrowing device, electronic device manufacturing method | Takahito Kumazaki | 2024-10-08 |
| 12105425 | Exposure method, exposure system, and method for manufacturing electronic devices | Koichi Fujii, Toshihiro OGA | 2024-10-01 |
| 12076815 | Laser processing apparatus and method for processing workpiece | Masashi SHIMBORI | 2024-09-03 |
| 12072507 | Laser radiation system | Hiroshi Ikenoue, Hiroaki Oizumi | 2024-08-27 |
| 12038567 | Pulse width expansion apparatus and electronic device manufacturing method | Hirotaka Miyamoto | 2024-07-16 |
| 11826852 | Laser processing apparatus, laser processing system, and laser processing method | Akira SUWA, Masashi SHIMBORI, Masakazu Kobayashi | 2023-11-28 |
| 11822324 | Machine learning method, consumable management apparatus, and computer readable medium | Kunihiko ABE, Yuji MINEGISHI, Satoru Kikuchi | 2023-11-21 |
| 11804697 | Laser system and electronic device manufacturing method | Taisuke Miura | 2023-10-31 |
| 11768362 | Laser radiation system and method for manufacturing electronic device | Akiyoshi Suzuki | 2023-09-26 |
| 11764541 | Laser system and method for manufacturing electronic device | Taisuke Miura, Hironori IGARASHI | 2023-09-19 |
| 11710660 | Laser irradiation method and laser irradiation system | Hiroshi Ikenoue, Hiroaki Oizumi, Akira SUWA | 2023-07-25 |
| 11614572 | Mirror for extreme ultraviolet light and extreme ultraviolet light generating apparatus | Yoshiyuki Honda | 2023-03-28 |
| 11604416 | Laser processing method and laser processing system | Koji Kakizaki, Masakazu Kobayashi, Akira SUWA | 2023-03-14 |
| 11502478 | Laser apparatus, laser apparatus management system, and laser apparatus management method | Hiroyuki Masuda | 2022-11-15 |
| 11477877 | Laser apparatus for generating extreme ultraviolet light | Hitoshi Nagano, Yasunori Wada, Tatsuya Yanagida | 2022-10-18 |
| 11469568 | Laser apparatus and laser processing system | Kouji Kakizaki | 2022-10-11 |
| 11465233 | Laser processing system and laser processing method | Kouji Kakizaki | 2022-10-11 |
| 11451003 | Laser gas regenerating apparatus and electronic device manufacturing method | Hiroaki TSUSHIMA, Satoshi Tanaka, Yousuke FUJIMAKI, Takeshi Asayama | 2022-09-20 |