Issued Patents All Time
Showing 1–25 of 115 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12109648 | Laser annealing apparatus and method for manufacturing electronic device | Satoshi Tanaka, Hideo Hoshino | 2024-10-08 |
| 12021229 | Multifunctional engineered particle for a secondary battery and method of manufacturing the same | Isaiah O. Oladeji, Koukou Suu | 2024-06-25 |
| 11894547 | Multifunctional engineered particle for a secondary battery and method of manufacturing the same | Isaiah O. Oladeji, Koukou Suu | 2024-02-06 |
| 11768362 | Laser radiation system and method for manufacturing electronic device | Osamu Wakabayashi | 2023-09-26 |
| 10739686 | Beam transmission system, exposure device, and illumination optical system of the exposure device | Osamu Wakabayashi | 2020-08-11 |
| 10092979 | Laser irradiation apparatus | Minoru Taniyama, Osamu Wakabayashi | 2018-10-09 |
| 10050408 | Laser system | Osamu Wakabayashi, Masaki Arakawa, Koji ASHIKAWA, Yasuhiro KAMBA | 2018-08-14 |
| 9966721 | Laser system | Kouji Kakizaki, Masaki Arakawa, Kouji Ashikawa, Yasuhiro KAMBA, Osamu Wakabayashi | 2018-05-08 |
| 9910351 | Imprint apparatus and article manufacturing method | Ken-ichiro Shinoda, Mitsuru Hiura | 2018-03-06 |
| 9791780 | Exposure apparatus | Takashi Onose, Kouji Kakizaki, Osamu Wakabayashi | 2017-10-17 |
| 9616613 | Imprint apparatus including alignment and overlay measurement | Ken-ichiro Shinoda, Mitsuru Hiura | 2017-04-11 |
| 9541825 | Imprint apparatus and article manufacturing method | Ken-ichiro Shinoda, Mitsuru Hiura | 2017-01-10 |
| 8085384 | Exposure apparatus | Akinori Ohkubo | 2011-12-27 |
| 7573563 | Exposure apparatus and device manufacturing method | Kenji Yamazoe, Seiji Takeuchi | 2009-08-11 |
| 7466395 | Exposure apparatus and device manufacturing method using the apparatus | Yumiko Ohsaki, Seiji Takeuchi | 2008-12-16 |
| 7327467 | Phase measuring method and apparatus for measuring characterization of optical thin films | Seiji Takeuchi, Minoru Yoshii | 2008-02-05 |
| 7217503 | Exposure method and apparatus | Kenji Saitoh, Kenji Yamazoe | 2007-05-15 |
| 7214453 | Mask and its manufacturing method, exposure, and device fabrication method | Kenji Yamazoe, Kenji Saitoh | 2007-05-08 |
| 7196773 | Illumination optical system and exposure apparatus using the same | — | 2007-03-27 |
| 7126667 | Exposure apparatus and method | Miyoko Kawashima | 2006-10-24 |
| 7107573 | Method for setting mask pattern and illumination condition | Kenji Yamazoe, Kenji Saitoh | 2006-09-12 |
| 7106455 | Interferometer and interferance measurement method | Yoshiyuki Sekine | 2006-09-12 |
| 7046337 | Exposure apparatus and method | Miyoko Kawashima | 2006-05-16 |
| 7030998 | Phase measurement apparatus for measuring characterization of optical thin films | Seiji Takeuchi, Minoru Yoshii | 2006-04-18 |
| 6992750 | Exposure apparatus and method | Miyoko Kawashima | 2006-01-31 |