Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9386210 | Imaging apparatus | — | 2016-07-05 |
| 9377677 | Generating method, creating method, exposure method, and storage medium | — | 2016-06-28 |
| 9329376 | Imaging apparatus | Yoshinari Higaki, Toshihiko Tsuji | 2016-05-03 |
| 9292925 | Imaging system and control method thereof | Tomochika Murakami | 2016-03-22 |
| 8502962 | Computer readable storage medium including effective light source calculation program, and exposure method | Kenji Yamazoe, Hironobu Fujishima | 2013-08-06 |
| 8365106 | Method for optimization of light effective source while target pattern is changed | — | 2013-01-29 |
| 8352892 | Method, computer-readable storage medium, and apparatus for generating a mask data and fabricating process | Manabu Hakko | 2013-01-08 |
| 8247141 | Method of generating reticle data, memory medium storing program for generating reticle data and method of producing reticle | Yoshinari Higaki | 2012-08-21 |
| 8234600 | Computer readable storage medium storing program for generating reticle data, and method of generating reticle data | — | 2012-07-31 |
| 8144967 | Mask data generation method, mask fabrication method, exposure method, device fabrication method, and storage medium | — | 2012-03-27 |
| 7947433 | Exposure method | — | 2011-05-24 |
| 7846625 | Phase shift mask | — | 2010-12-07 |
| 7592130 | Exposure method | — | 2009-09-22 |
| 7547502 | Exposure method | — | 2009-06-16 |
| 7518707 | Exposure apparatus | — | 2009-04-14 |
| 7505112 | Multiple exposure method | Mitsuro Sugita | 2009-03-17 |
| 7402378 | Exposure method and apparatus | Kenji Saitoh | 2008-07-22 |
| 7126667 | Exposure apparatus and method | Akiyoshi Suzuki | 2006-10-24 |
| 7046337 | Exposure apparatus and method | Akiyoshi Suzuki | 2006-05-16 |
| 7023522 | Multiple exposure method | Mitsuro Sugita | 2006-04-04 |
| 7009686 | Exposure method | Kenji Yamazoe | 2006-03-07 |
| 6992750 | Exposure apparatus and method | Akiyoshi Suzuki | 2006-01-31 |
| 6991896 | Exposure method | — | 2006-01-31 |
| 6991877 | Exposure method and apparatus | Kenji Saitoh | 2006-01-31 |
| 6930754 | Multiple exposure method | Mitsuro Sugita | 2005-08-16 |