Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11841614 | Exposure apparatus, exposure method, and article manufacturing method | Kanji Suzuki | 2023-12-12 |
| 11592750 | Exposure apparatus, exposure method, decision method, and article manufacturing method | — | 2023-02-28 |
| 9035230 | Optical element and image sensor | — | 2015-05-19 |
| 8352892 | Method, computer-readable storage medium, and apparatus for generating a mask data and fabricating process | Miyoko Kawashima | 2013-01-08 |
| 8163448 | Determination method, exposure method, device fabrication method, and storage medium | Kenji Yamazoe | 2012-04-24 |
| 7927773 | Memory medium storing original data generation program, memory medium storing illumination condition determination program, original data generation method, illumination condition determination method, and device manufacturing method | — | 2011-04-19 |
| 7382552 | Zoom optical system | Koshi Hatakeyama | 2008-06-03 |
| 7295378 | Zoom optical system | Koshi Hatakeyama | 2007-11-13 |
| 7130131 | Zoom optical system | Koshi Hatakeyama | 2006-10-31 |
| 7126761 | Zoom optical system | Koshi Hatakeyama | 2006-10-24 |