Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12429795 | Detection apparatus, lithography apparatus, and article manufacturing method | Ryo Nakayama, Takahiro Matsumoto, Takafumi Miyaharu, Yuichi Fujita | 2025-09-30 |
| 12405538 | Calibration method, detection system, exposure apparatus, article manufacturing method, and non-transitory computer-readable storage medium | Wataru Yamaguchi | 2025-09-02 |
| 11231573 | Position detection apparatus, exposure apparatus, and article manufacturing method | Hironori Maeda | 2022-01-25 |
| 10747116 | Pattern forming apparatus and article manufacturing method | — | 2020-08-18 |
| 10545415 | Detection apparatus, pattern forming apparatus, obtaining method, detection method, and article manufacturing method | — | 2020-01-28 |
| 8502962 | Computer readable storage medium including effective light source calculation program, and exposure method | Miyoko Kawashima, Kenji Yamazoe | 2013-08-06 |