Issued Patents All Time
Showing 1–25 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12366812 | Detection apparatus, detection method, exposure apparatus and article manufacturing method | Ryo Takai, Masakatsu Yanagisawa | 2025-07-22 |
| 12061079 | Detection method, detection apparatus, lithography apparatus, and article manufacturing method | Masaharu Kajitani | 2024-08-13 |
| 11407703 | Method for converting hydroxyl group of alcohol | Hideo Shimizu, Kiyoto Hori | 2022-08-09 |
| 11377411 | Method for producing 3-methylcycloalkenone compound | — | 2022-07-05 |
| 11333986 | Detection apparatus, exposure apparatus, and article manufacturing method | Kazuki Ota | 2022-05-17 |
| 11231573 | Position detection apparatus, exposure apparatus, and article manufacturing method | Hironobu Fujishima | 2022-01-25 |
| 11169452 | Measurement apparatus, exposure apparatus, and method of manufacturing article | Ken Minoda | 2021-11-09 |
| 10656541 | Measurement apparatus, exposure apparatus, and method of manufacturing article | — | 2020-05-19 |
| 9939741 | Lithography apparatus, and method of manufacturing article | — | 2018-04-10 |
| 9869936 | Detection apparatus, measurement apparatus, lithography apparatus, and method of manufacturing article | — | 2018-01-16 |
| 9785542 | Implementing edit and update functionality within a development environment used to compile test plans for automated semiconductor device testing | Mark Elston, Leon Chen, Harsanjeet Singh, Ankan Pramanick, Youbi Katsu | 2017-10-10 |
| 9718234 | Imprint lithography apparatus and device manufacturing method therefor | Seiya Miura, Kazuhiko Mishima, Ken Minoda | 2017-08-01 |
| 9645514 | Imprint apparatus, imprint method, and device manufacturing method | Seiya Miura, Kazuhiko Mishima, Ken Minoda | 2017-05-09 |
| 9639000 | Position detector, position detection method, exposure apparatus, and method of manufacturing device | — | 2017-05-02 |
| 9535321 | Imprint apparatus and article manufacturing method | — | 2017-01-03 |
| 9523927 | Exposure apparatus with detection apparatus for detection of upper and lower surface marks, and device manufacturing method | — | 2016-12-20 |
| 9400436 | Detection device, exposure apparatus, and device manufacturing method using same | — | 2016-07-26 |
| 9291921 | Detection apparatus, exposure apparatus, device fabrication method and filter to reduce a difference between detected intensity values of lights having different wavelength ranges | — | 2016-03-22 |
| 9283720 | Position detection apparatus, imprint apparatus, and position detection method | Ken Minoda, Yoshihiro Shiode, Kazuhiko Mishima | 2016-03-15 |
| 9274911 | Using shared pins in a concurrent test execution environment | Mark Elston, Harsanjeet Singh, Ankan Pramanick, Leon Chen, Chandra Pinjala +1 more | 2016-03-01 |
| 9188855 | Imprint apparatus, imprint method, and device manufacturing method | Seiya Miura, Kazuhiko Mishima, Ken Minoda | 2015-11-17 |
| 9061959 | Method for manufacturing optically active menthol | Hisanori Itoh, Shinya Yamada, Yoji Hori | 2015-06-23 |
| 9000192 | Catalyst for asymmetric hydrogenation and method for manufacturing optically active carbonyl compound using the same | Shinya Yamada, Yoji Hori | 2015-04-07 |
| 8922786 | Detector, imprint apparatus, and article manufacturing method | Toshiki Iwai, Kazuhiko Mishima, Ken Minoda | 2014-12-30 |
| 8842294 | Position detection apparatus, imprint apparatus, and position detection method | Ken Minoda, Yoshihiro Shiode, Kazuhiko Mishima | 2014-09-23 |