Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9718234 | Imprint lithography apparatus and device manufacturing method therefor | Hironori Maeda, Kazuhiko Mishima, Ken Minoda | 2017-08-01 |
| 9645514 | Imprint apparatus, imprint method, and device manufacturing method | Hironori Maeda, Kazuhiko Mishima, Ken Minoda | 2017-05-09 |
| 9564374 | Forming method and method of manufacturing article | Masaki Mizutani, Kenichiro Mori | 2017-02-07 |
| 9188855 | Imprint apparatus, imprint method, and device manufacturing method | Hironori Maeda, Kazuhiko Mishima, Ken Minoda | 2015-11-17 |
| 8130360 | Exposure apparatus and device manufacturing method | Shinichiro Hirai, Tetsuya Mori, Yoshinori Ohsaki | 2012-03-06 |
| 7656503 | Exposure apparatus and image plane detecting method | — | 2010-02-02 |
| 7348107 | Reticle, semiconductor exposure apparatus and method, and semiconductor device manufacturing method | Tsutomu Takenaka | 2008-03-25 |
| 7221434 | Exposure method and apparatus | Yoshihiro Shiode | 2007-05-22 |
| 7193685 | Exposure apparatus | — | 2007-03-20 |
| 7050151 | Exposure apparatus, exposure method, and device manufacturing method | — | 2006-05-23 |
| 5963316 | Method and apparatus for inspecting a surface state | Michio Kohno, Nobuhiro Kodachi | 1999-10-05 |
| 5815607 | Image reading device, and inspection apparatus and exposure apparatus using the device | — | 1998-09-29 |
| 5652657 | Inspection system for original with pellicle | Minoru Yoshii, Michio Kohno, Kyoichi Miyazaki, Toshihiko Tsuji, Seiji Takeuchi | 1997-07-29 |
| 5585916 | Surface inspecting device | Michio Kohno | 1996-12-17 |
| 5581348 | Surface inspecting device using bisected multi-mode laser beam and system having the same | Michio Kohno, Takehiko Iwanaga | 1996-12-03 |
| 5160962 | Projection exposure apparatus | Akiyoshi Suzuki | 1992-11-03 |