Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7072027 | Exposure apparatus, method of controlling same, and method of manufacturing devices | — | 2006-07-04 |
| 7046336 | Scanning exposure apparatus | — | 2006-05-16 |
| 6954259 | Scanning exposure apparatus | — | 2005-10-11 |
| 6909372 | Power monitoring unit, control method therefor, and exposure apparatus | Kazuhito Outsuka, Toshiyuki Shigaraki | 2005-06-21 |
| 6816239 | Exposure apparatus, method of controlling same, and method of manufacturing devices | — | 2004-11-09 |
| 6788391 | Illumination device, exposure apparatus and exposure method | — | 2004-09-07 |
| 6396562 | Microdevice manufacturing apparatus | — | 2002-05-28 |
| 5920398 | Surface position detecting method and scanning exposure method using the same | Yuichi Yamada, Shigeyuki Uzawa | 1999-07-06 |
| 5581348 | Surface inspecting device using bisected multi-mode laser beam and system having the same | Seiya Miura, Michio Kohno | 1996-12-03 |
| 5347118 | Aligning method and apparatus detecting misalignment using image signals from image pickup | — | 1994-09-13 |