Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6909372 | Power monitoring unit, control method therefor, and exposure apparatus | Takehiko Iwanaga, Toshiyuki Shigaraki | 2005-06-21 |
| 6714691 | Exposure method and apparatus, and device manufacturing method using the same | — | 2004-03-30 |
| 6608667 | Exposure apparatus and device manufacturing method | Hiroyuki Koide | 2003-08-19 |
| 5925887 | Projection exposure apparatus including an optical characteristic detector for detecting a change in optical characteristic of a projection optical system and device manufacturing method using the same | Fumio Sakai, Yuichi Yamada, Kazuhiro Takahashi, Yasuo Hasegawa, Hideki Nogawa +1 more | 1999-07-20 |
| 4814829 | Projection exposure apparatus | Masao Kosugi, Akiyoshi Suzuki, Hideki Ina, Shigeki Ogawa, Masao Totsuka +1 more | 1989-03-21 |