Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8927949 | Measuring apparatus, drawing apparatus, and article manufacturing method | — | 2015-01-06 |
| 8922774 | Method of manufacturing device, and substrate | Koichi Sentoku, Hideki Ina | 2014-12-30 |
| 6248267 | Method for manufacturing fibril system fiber | Yoshihiko Hosako, Teruyuki Yamada, Katsuhiko Shinada, Hideaki Habara, Sadatoshi Nagamine +2 more | 2001-06-19 |
| 5843290 | Electrolytic polishing apparatus | Yoshimaro Tezuka, Katsuhisa Tokunaga, Mitsuyuki Kakimoto, Miyuki Tani, Satoshi Kobayashi +2 more | 1998-12-01 |
| 5751404 | Exposure apparatus and method wherein alignment is carried out by comparing marks which are incident on both reticle stage and wafer stage reference plates | Eiichi Murakami, Fumio Sakai, Shigeyuki Uzawa, Tetsuya Mori | 1998-05-12 |
| 5660708 | Process for manufacturing a lead frame | Yoshimaro Tezuka, Katsuhisa Tokunaga, Mitsuyuki Kakimoto, Miyuki Tani, Satoshi Kobayashi +2 more | 1997-08-26 |
| 5228420 | Valve rocker cover | Katsuji Furuya, Kyoko Kishimoto | 1993-07-20 |
| 4814829 | Projection exposure apparatus | Masao Kosugi, Akiyoshi Suzuki, Hideki Ina, Kazuhito Outsuka, Masao Totsuka +1 more | 1989-03-21 |
| 4803389 | Stepping motor, method of driving the same and drive circuit therefor | Eiichi Tsukada | 1989-02-07 |