Issued Patents All Time
Showing 25 most recent of 114 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11686688 | Inspection apparatus and manufacturing method for semiconductor device | Kosuke Asano | 2023-06-27 |
| 11682688 | Photoelectric converting device and apparatus | Keita Torii | 2023-06-20 |
| 11543755 | Method of manufacturing semiconductor device | Takehiro Toyoda, Hiroaki Kobayashi, Kosuke Asano, Kouki Miyano | 2023-01-03 |
| 11332409 | Optical apparatus and equipment | Yoshihisa Kawamura, Ryo Yoshida, Yukinobu Suzuki, Koji Hara, Yoshiyuki Nakagawa | 2022-05-17 |
| 10403667 | Photoelectric conversion device and manufacturing method of the same having waveguide inclined side face with improved sensitivity by increasing reflection rate of light reaching side face near incident face or entrance face of waveguide | Takashi Usui, Keita Torii, Yusuke Onuki | 2019-09-03 |
| 9760000 | Imprint apparatus, imprint method, and article manufacturing method | — | 2017-09-12 |
| 9625836 | Interferometer, lithography apparatus, and method of manufacturing article | Wataru Yamaguchi, Takahiro Matsumoto | 2017-04-18 |
| 9606460 | Lithography apparatus, and method of manufacturing article | Yuichi Iwasaki, Satoru Oishi | 2017-03-28 |
| 9280048 | Imprint apparatus and method of manufacturing article | Hiroshi Sato | 2016-03-08 |
| 9257262 | Lithography apparatus, lithography method, and method of manufacturing article | Koichi Sentoku | 2016-02-09 |
| 9122149 | Imprint apparatus and method of manufacturing article | Hiroshi Sato | 2015-09-01 |
| 9046793 | Light transmissive mold and apparatus for imprinting a pattern onto a material applied on a semiconductor workpiece and related methods | Nobuhito Suehira, Junichi Seki, Masao Majima, Atsunori Terasaki | 2015-06-02 |
| 9039402 | Imprinting apparatus and method therefor | Eigo Kawakami, Shingo Okushima, Junichi Seki, Atsunori Terasaki, Motoki Okinaka | 2015-05-26 |
| 8973495 | Imprint apparatus, imprint method, and article manufacturing method | Kazuyuki Kasumi | 2015-03-10 |
| 8976370 | Measuring apparatus, imprint system, measuring method, and device manufacturing method | Takahiro Miyakawa, Kazuhiro Sato, Ken Minoda | 2015-03-10 |
| 8922774 | Method of manufacturing device, and substrate | Koichi Sentoku, Shigeki Ogawa | 2014-12-30 |
| 8845318 | Imprint apparatus, imprint method, and mold for imprint | Nobuhito Suehira, Junichi Seki | 2014-09-30 |
| 8845317 | Alignment method, imprint method, alignment apparatus, and position measurement method | Nobuhito Suehira, Junichi Seki, Koichi Sentoku | 2014-09-30 |
| 8770958 | Pattern forming method and pattern forming apparatus in which a substrate and a mold are aligned in an in-plane direction | Nobuhito Suehira, Junichi Seki, Masao Majima, Atsunori Terasaki | 2014-07-08 |
| 8668484 | Mold, imprint method, and process for producing a chip | Atsunori Terasaki, Junichi Seki, Nobuhito Suehira, Shingo Okushima | 2014-03-11 |
| 8568639 | Process for producing a device using a mold | Atsunori Terasaki, Junichi Seki, Nobuhito Suehira | 2013-10-29 |
| 8564761 | Surface shape measuring apparatus, exposure apparatus, and device manufacturing method | Wataru Yamaguchi, Takahiro Matsumoto | 2013-10-22 |
| 8562846 | Process for producing a chip using a mold | Atsunori Terasaki, Junichi Seki, Nobuhito Suehira, Shingo Okushima | 2013-10-22 |
| 8414279 | Imprint apparatus and article manufacturing method | Eigo Kawakami, Kazuyuki Kasumi | 2013-04-09 |
| 8404169 | Imprint apparatus and method of manufacturing article | Eigo Kawakami, Junichi Seki, Atsunori Terasaki, Shingo Okushima, Motoki Okinaka | 2013-03-26 |