Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11973108 | Semiconductor device and manufacturing method thereof | Wei Ni, Tetsuya Hayashi, Keiichiro Numakura, Toshiharu Marui, Ryouta TANAKA | 2024-04-30 |
| 11881526 | Semiconductor device and method for manufacturing same | Toshiharu Marui, Tetsuya Hayashi, Keiichiro Numakura, Wei Ni, Ryota Tanaka | 2024-01-23 |
| 11745409 | Storage device, ejection-material ejection device, and imprint apparatus | Nobuto Kawahara, Yoshimasa Araki, Yutaka Mita, Noriyasu Hasegawa | 2023-09-05 |
| 11535039 | Ejection-material ejection apparatus and imprinting apparatus | Nobuto Kawahara, Yoshimasa Araki, Noriyasu Hasegawa | 2022-12-27 |
| 11520227 | Ejection material filling device, pressure regulation device, and ejection material filling method | Yoshimasa Araki, Noriyasu Hasegawa, Hideki Matsumoto | 2022-12-06 |
| 11146163 | Switching device and method for controlling switching device | Taku Shimomura, Tetsuya Hayashi, Akinori Okubo, Daiki Sato | 2021-10-12 |
| 10987840 | Ejection-material ejection apparatus and imprinting apparatus | — | 2021-04-27 |
| 10476495 | Drive device | Taku Shimomura, Tetsuya Hayashi, Akinori Okubo | 2019-11-12 |
| 9606460 | Lithography apparatus, and method of manufacturing article | Satoru Oishi, Hideki Ina | 2017-03-28 |
| 8484910 | Active dynamic vibration absorber | Ikuo Shimoda, Mitsuru Miyazaki | 2013-07-16 |
| 8363205 | Exposure apparatus | — | 2013-01-29 |
| 8035796 | Immersion exposure apparatus and device manufacturing method | — | 2011-10-11 |
| 7679717 | Exposure apparatus | — | 2010-03-16 |
| 7276707 | Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus | Masato Muraki, Kenji Tamamori, Kouji Asano, Masayoshi Esashi, Yoshinori Nakayama +2 more | 2007-10-02 |
| 7018783 | Fine structure and devices employing it | Ichiro Tanaka | 2006-03-28 |
| 6953938 | Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus | Masato Muraki, Kenji Tamamori, Kouji Asano, Masayoshi Esashi, Yoshinori Nakayama +2 more | 2005-10-11 |
| 6930834 | Method of manufacturing diffractive optical element | Makoto Ogusu | 2005-08-16 |
| 6818911 | Array structure and method of manufacturing the same, charged particle beam exposure apparatus, and device manufacturing method | Kenji Tamamori, Masato Muraki, Yoshinori Nakayama, Kouji Asano, Yoshiaki Moro +1 more | 2004-11-16 |
| 6534242 | Multiple exposure device formation | Mitsuro Sugita, Akiyoshi Suzuki, Miyoko Kawashima, Kenji Saitoh | 2003-03-18 |
| 6514674 | Method of forming an optical element | — | 2003-02-04 |
| 6475704 | Method for forming fine structure | Ichiro Tanaka | 2002-11-05 |