Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11745409 | Storage device, ejection-material ejection device, and imprint apparatus | Yoshimasa Araki, Yutaka Mita, Noriyasu Hasegawa, Yuichi Iwasaki | 2023-09-05 |
| 11573487 | Imprint apparatus, imprinting method, and method of manufacturing article | Yutaka Mita | 2023-02-07 |
| 11535039 | Ejection-material ejection apparatus and imprinting apparatus | Yoshimasa Araki, Yuichi Iwasaki, Noriyasu Hasegawa | 2022-12-27 |
| 11333972 | Ejection-material ejection device, information processing apparatus, and control method of ejection-material ejection device | Hisashi Namba, Noriyasu Hasegawa, Ken Katsuta, Hideki Matsumoto | 2022-05-17 |
| 11267252 | Ejection apparatus and imprint apparatus | Masahiro Kuri, Noriyasu Hasegawa, Hisashi Namba, Ken Katsuta, Keita Sakai +1 more | 2022-03-08 |
| 10513125 | Fluid containing member | Yutaka Mita, Yoshimasa Araki, Noriyasu Hasegawa | 2019-12-24 |
| 10335984 | Imprint apparatus and article manufacturing method | Byung-Jin Choi, Anshuman Cherala, Zhengmao Ye, Xiaoming Lu, Kang Luo +1 more | 2019-07-02 |
| 10199244 | Imprint apparatus, and method of manufacturing article | Yoshikazu Miyajima, Zhengmao Ye, Anshuman Cherala, Byung-Jin Choi, Xiaoming Lu +1 more | 2019-02-05 |
| 7864297 | Light blocking device and exposure apparatus | — | 2011-01-04 |
| 7053989 | Exposure apparatus and exposure method | — | 2006-05-30 |
| 6876437 | Illumination optical system, exposure method and apparatus using the same | — | 2005-04-05 |