Issued Patents All Time
Showing 25 most recent of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12317421 | Apparatus including a plurality of heads and a method of using the same | Byung-Jin Choi | 2025-05-27 |
| 12269282 | Nanoimprint lithography template with peripheral pockets, system of using the template, and method of using the template | — | 2025-04-08 |
| 12153342 | Nanofabrication method with correction of distortion within an imprint system | Se-Hyuk Im | 2024-11-26 |
| 12124165 | Apparatus and method for optimizing actuator forces | Nilabh K. Roy | 2024-10-22 |
| 11604409 | Template replication | Byung-Jin Choi, Mario Johannes Meissl | 2023-03-14 |
| 11567401 | Nanofabrication method with correction of distortion within an imprint system | Byung-Jin Choi | 2023-01-31 |
| 11550216 | Systems and methods for curing a shaped film | Mario Johannes Meissl, Byung-Jin Choi | 2023-01-10 |
| 11454883 | Template replication | Byung-Jin Choi, Mario Johannes Meissl | 2022-09-27 |
| 11366384 | Nanoimprint lithography system and method for adjusting a radiation pattern that compensates for slippage of a template | Nilabh K. Roy | 2022-06-21 |
| 11347144 | Overlay improvement in nanoimprint lithography | Mario Johannes Meissl, Byung-Jin Choi | 2022-05-31 |
| 11327409 | Systems and methods for curing an imprinted field | Nilabh K. Roy | 2022-05-10 |
| 11262652 | Nanofabrication method with correction of distortion within an imprint system | Ahmed M. Hussein | 2022-03-01 |
| 11199774 | Method and apparatus to improve frame cure imaging resolution for extrusion control | Nilabh K. Roy | 2021-12-14 |
| 11020894 | Safe separation for nano imprinting | Se-Hyuk Im, Mahadevan GanapathiSubramanian, Edward Brian Fletcher, Niyaz Khusnatdinov, Gerard Schmid +4 more | 2021-06-01 |
| 10996560 | Real-time correction of template deformation in nanoimprint lithography | Mario Johannes Meissl, Byung-Jin Choi | 2021-05-04 |
| 10866510 | Overlay improvement in nanoimprint lithography | Mario Johannes Meissl, Byung-Jin Choi | 2020-12-15 |
| 10578984 | Adaptive chucking system | Mario Johannes Meissl, Byung-Jin Choi | 2020-03-03 |
| 10553501 | Apparatus for use in forming an adaptive layer and a method of using the same | Mario Johannes Meissl | 2020-02-04 |
| 10335984 | Imprint apparatus and article manufacturing method | Byung-Jin Choi, Zhengmao Ye, Xiaoming Lu, Kang Luo, Nobuto Kawahara +1 more | 2019-07-02 |
| 10199244 | Imprint apparatus, and method of manufacturing article | Nobuto Kawahara, Yoshikazu Miyajima, Zhengmao Ye, Byung-Jin Choi, Xiaoming Lu +1 more | 2019-02-05 |
| 10191368 | Multi-field overlay control in jet and flash imprint lithography | Sidlgata V. Sreenivasan, Paras Ajay | 2019-01-29 |
| 10026609 | Nanoshape patterning techniques that allow high-speed and low-cost fabrication of nanoshape structures | Sidlgata V. Sreenivasan, Meghali Chopra, Roger T. Bonnecaze, Ovadia Abed, Bailey Yin +3 more | 2018-07-17 |
| 9993962 | Method of imprinting to correct for a distortion within an imprint system | — | 2018-06-12 |
| 9778578 | Low contact imprint lithography template chuck system for improved overlay correction | Mario Johannes Meissl, Byung-Jin Choi, Seth J. Bamesberger | 2017-10-03 |
| 9778562 | Porous template and imprinting stack for nano-imprint lithography | Frank Y. Xu, Weijun Liu, Edward Brian Fletcher, Sidlgata V. Sreenivasan, Byung-Jin Choi +2 more | 2017-10-03 |