Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11020894 | Safe separation for nano imprinting | Se-Hyuk Im, Edward Brian Fletcher, Niyaz Khusnatdinov, Gerard Schmid, Mario Johannes Meissl +4 more | 2021-06-01 |
| 10578964 | Asymmetric template shape modulation for partial field imprinting | Matthew Michael Kincaid, Byung-Jin Choi, Sidlgata V. Sreenivasan | 2020-03-03 |
| 10409156 | Mold, imprint apparatus, and method of manufacturing article | Byung-Jin Choi, Naoki Murasato, Yoshikazu Miyajima | 2019-09-10 |
| 9616614 | Large area imprint lithography | Byung-Jin Choi, Se Hyun Ahn, Michael Nevin Miller, Sidlgata V. Sreenivasan | 2017-04-11 |
| 9529274 | Chucking system with recessed support feature | Mario Johannes Meissl, Avinash Panga, Byung-Jin Choi | 2016-12-27 |
| 9164375 | Dual zone template chuck | Byung-Jin Choi | 2015-10-20 |
| 8968620 | Safe separation for nano imprinting | Se-Hyuk Im, Edward Brian Fletcher, Niyaz Khusnatdinov, Gerard Schmid, Mario Johannes Meissl +4 more | 2015-03-03 |
| 8913230 | Chucking system with recessed support feature | Mario Johannes Meissl, Avinash Panga, Byung-Jin Choi | 2014-12-16 |
| 8309008 | Separation in an imprint lithography process | Byung-Jin Choi | 2012-11-13 |
| 8237133 | Energy sources for curing in an imprint lithography system | Byung-Jin Choi, Liang-Tang Wang, Alex Ruiz | 2012-08-07 |
| 8231821 | Substrate alignment | Byung-Jin Choi, Pawan Kumar Nimmakayala | 2012-07-31 |
| 8215946 | Imprint lithography system and method | Byung-Jin Choi, Mario Johannes Meissl | 2012-07-10 |
| 7906058 | Bifurcated contact printing technique | Byung-Jin Choi, Michael Nevin Miller, Nicholas A. Stacey, Michael Watts | 2011-03-15 |
| 7803308 | Technique for separating a mold from solidified imprinting material | Byung-Jin Choi, Michael Nevin Miller, Nicholas A. Stacey | 2010-09-28 |
| 7641840 | Method for expelling gas positioned between a substrate and a mold | Byung-Jin Choi, Yeong-Jun Choi, Mario Johannes Meissl | 2010-01-05 |
| 7504268 | Adaptive shape substrate support method | Sldlgata V. Sreenivasan | 2009-03-17 |
| 7307697 | Adaptive shape substrate support system | Sidlgata V. Sreenivasan | 2007-12-11 |