Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11161280 | Strain and kinetics control during separation phase of imprint process | Niyaz Khusnatdinov, Frank Y. Xu, Mario Johannes Meissl, Michael Nevin Miller, Ecron D. Thompson +3 more | 2021-11-02 |
| 8652393 | Strain and kinetics control during separation phase of imprint process | Niyaz Khusnatdinov, Frank Y. Xu, Mario Johannes Meissl, Michael Nevin Miller, Ecron D. Thompson +3 more | 2014-02-18 |
| 8432548 | Alignment for edge field nano-imprinting | Byung-Jin Choi, Philip D. Schumaker | 2013-04-30 |
| 8334967 | Substrate support system having a plurality of contact lands | Sidlgata V. Sreenivasan | 2012-12-18 |
| 8231821 | Substrate alignment | Byung-Jin Choi, Mahadevan GanapathiSubramanian | 2012-07-31 |
| 8147731 | Alignment system and method for a substrate in a nano-imprint process | Byung-Jin Choi | 2012-04-03 |
| 7880872 | Interferometric analysis method for the manufacture of nano-scale devices | Tom H. Rafferty, Alireza Aghili, Byung-Jin Choi, Philip D. Schumaker, Daniel Babbs +1 more | 2011-02-01 |
| 7837907 | Alignment system and method for a substrate in a nano-imprint process | Byung-Jin Choi | 2010-11-23 |
| 7785096 | Enhanced multi channel alignment | Byung-Jin Choi, Tom H. Rafferty, Philip D. Schumaker | 2010-08-31 |
| 7630067 | Interferometric analysis method for the manufacture of nano-scale devices | Tom H. Rafferty, Alireza Aghili, Byung-Jin Choi, Philip D. Schumaker, Daniel Babbs +1 more | 2009-12-08 |
| 7420654 | Method of varying dimensions of a substrate during nano-scale manufacturing | Anshuman Cherala, Byung-Jin Choi, Mario Johannes Meissl, Sidlgata V. Sreenivasan | 2008-09-02 |
| 7323130 | Magnification correction employing out-of-plane distortion of a substrate | Sidlgata V. Sreenivasan, Byung-Jin Choi, Anshuman Cherala | 2008-01-29 |
| 7298456 | System for varying dimensions of a substrate during nanoscale manufacturing | Anshuman Cherala, Byung-Jin Choi, Mario Johannes Meissl, Sidlgata V. Sreenivasan | 2007-11-20 |
| 7292326 | Interferometric analysis for the manufacture of nano-scale devices | Tom H. Rafferty, Alireza Aghili, Byung-Jin Choi, Philip D. Schumaker, Daniel Babbs | 2007-11-06 |
| 7259833 | Substrate support method | Sidlgata V. Sreenivasan | 2007-08-21 |
| 7245358 | Substrate support system | Sidlgata V. Sreenivasan | 2007-07-17 |
| 7170589 | Apparatus to vary dimensions of a substrate during nano-scale manufacturing | Anshuman Cherala, Byung-Jin Choi, Mario Johannes Meissl, Sidlgata V. Sreenivasan | 2007-01-30 |