| 12206342 |
Substrate processing apparatus |
Jairo T. Moura, Vincent W. Tsang, Karanjit Singh Saini, Robert T. Caveney, Robert C. May |
2025-01-21 |
| 12162698 |
Substrate transport apparatus |
Vincent W. Tsang, Robert C. May |
2024-12-10 |
| 12142505 |
Transport apparatus with linear bearing |
Robert C. May, Robert T. Caveney |
2024-11-12 |
| 12142511 |
Substrate processing apparatus |
Alexander Krupyshev, Ulysses Gilchrist, Robert T. Caveney |
2024-11-12 |
| 11978648 |
Substrate transport |
Robert T. Caveney, Robert C. May, Krzysztof A Majczak |
2024-05-07 |
| 11658051 |
Substrate transport |
Robert T. Caveney, Robert C. May, Krzysztof A Majczak |
2023-05-23 |
| 11545380 |
Transport apparatus with linear bearing |
Robert C. May, Robert T. Caveney |
2023-01-03 |
| 11235935 |
Substrate transport apparatus |
Vincent W. Tsang, Robert C. May |
2022-02-01 |
| 11201070 |
Side opening unified pod |
William J. Fosnight, Robert C. May, William C. Weaver |
2021-12-14 |
| 11121015 |
Substrate transport |
Robert T. Caveney, Robert C. May, Krzysztof A Majczak |
2021-09-14 |
| 10679882 |
Reduced capacity carrier, transport, load port, buffer system |
Michael L. Bufano, Ulysses Gilchrist, William J. Fosnight, Christopher Hofmeister, Robert C. May |
2020-06-09 |
| 10395959 |
Substrate transport |
Robert T. Caveney, Robert C. May, Krysztof A. Majczak |
2019-08-27 |
| 9978623 |
Side opening unified pod |
William J. Fosnight, Robert C. May, William C. Weaver |
2018-05-22 |
| 9224628 |
Reduced capacity carrier, transport, load port, buffer system |
Michael L. Bufano, Ulysses Gilchrist, William J. Fosnight, Christopher Hofmeister, Robert C. May |
2015-12-29 |
| 9105673 |
Side opening unified pod |
William J. Fosnight, Robert C. May, William C. Weaver |
2015-08-11 |
| 8827618 |
Transport system |
Robert C. May |
2014-09-09 |
| 8328495 |
Reduced capacity carrier, transport, load port, buffer system |
Michael L. Bufano, Ulysses Gilchrist, William J. Fosnight, Christopher Hofmeister, Robert C. May |
2012-12-11 |
| 8297319 |
Carrier gas system and coupling substrate carrier to a loadport |
William J. Fosnight |
2012-10-30 |
| 8272827 |
Reduced capacity carrier, transport, load port, buffer system |
Michael L. Bufano, Ulysses Gilchrist, William J. Fosnight, Christopher Hofmeister, Robert C. May |
2012-09-25 |
| 8267634 |
Reduced capacity carrier, transport, load port, buffer system |
Michael L. Bufano, Ulysses Gilchrist, William J. Fosnight, Christopher Hofmeister, Robert C. May |
2012-09-18 |
| 8033815 |
Chucking system for nano-manufacturing |
Byung-Jin Choi, Anshuman Cherala |
2011-10-11 |
| 7880872 |
Interferometric analysis method for the manufacture of nano-scale devices |
Pawan Kumar Nimmakayala, Tom H. Rafferty, Alireza Aghili, Byung-Jin Choi, Philip D. Schumaker +1 more |
2011-02-01 |
| 7798758 |
Reduced capacity carrier, transport, load port, buffer system |
Michael L. Bufano, Ulysses Gilchrist, William J. Fosnight, Christopher Hofmeister, Robert C. May |
2010-09-21 |
| 7798801 |
Chucking system for nano-manufacturing |
Byung-Jin Choi, Anshuman Cherala |
2010-09-21 |
| 7665981 |
System to transfer a template transfer body between a motion stage and a docking plate |
Philip D. Schumaker, Angelo Fancello, Jae Hong Kim, Byung-Jin Choi |
2010-02-23 |
