Issued Patents All Time
Showing 26–46 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7636999 | Method of retaining a substrate to a wafer chuck | Byung-Jin Choi, Anshuman Cherala | 2009-12-29 |
| 7635445 | Method of separating a mold from a solidified layer disposed on a substrate | Byung-Jin Choi, Anshuman Cherala, Yeong-Jun Choi, Mario Johannes Meissl, Sidlgata V. Sreenivasan +3 more | 2009-12-22 |
| 7630067 | Interferometric analysis method for the manufacture of nano-scale devices | Pawan Kumar Nimmakayala, Tom H. Rafferty, Alireza Aghili, Byung-Jin Choi, Philip D. Schumaker +1 more | 2009-12-08 |
| 7531025 | Method of creating a turbulent flow of fluid between a mold and a substrate | Ian McMackin, Nicholas A. Stacey, Duane J. Voth, Mathew P. C. Watts, Van Nguyen Truskett +3 more | 2009-05-12 |
| 7292326 | Interferometric analysis for the manufacture of nano-scale devices | Pawan Kumar Nimmakayala, Tom H. Rafferty, Alireza Aghili, Byung-Jin Choi, Philip D. Schumaker | 2007-11-06 |
| 7270533 | System for creating a turbulent flow of fluid between a mold and a substrate | Ian McMackin, Nicholas A. Stacey, Duane J. Voth, Mathew P. C. Watts, Van Nguyen Truskett +3 more | 2007-09-18 |
| 7224443 | Imprint lithography substrate processing tool for modulating shapes of substrates | Byung-Jin Choi, Ronald D. Voisin, Sidlgata V. Sreenivasan, Michael Watts, Mario Johannes Meissl +2 more | 2007-05-29 |
| 7090716 | Single phase fluid imprint lithography method | Ian McMackin, Nicholas A. Stacey, Duane J. Voth, Michael Watts, Van Nguyen Truskett +3 more | 2006-08-15 |
| 7019819 | Chucking system for modulating shapes of substrates | Byung-Jin Choi, Ronald D. Voisin, Sidlgata V. Sreenivasan, Michael Watts, Mario Johannes Meissl +2 more | 2006-03-28 |
| 6982783 | Chucking system for modulating shapes of substrates | Byung-Jin Choi, Ronald D. Voisin, Sidlgata V. Sreenivasan, Michael Watts, Mario Johannes Meissl +2 more | 2006-01-03 |
| 6805054 | Method, system and holder for transferring templates during imprint lithography processes | Mario Johannes Meissl, Byung-Jin Choi, Hillman Bailey | 2004-10-19 |
| 6729462 | Edge grip aligner with buffering capabilities | Jae Hong Kim, Matt W. Coady, William J. Fosnight | 2004-05-04 |
| 6591960 | Edge grip aligner with buffering capabilities | Jae Hong Kim, Matt W. Coady, William J. Fosnight | 2003-07-15 |
| 6520727 | Modular sorter | Timothy Ewald, Matthew W. Coady, William J. Fosnight | 2003-02-18 |
| 6326755 | System for parallel processing of workpieces | Timothy Ewald, Matthew W. Coady, Jae Hong Kim | 2001-12-04 |
| 5984116 | Substrate support apparatus for a substrate housing | — | 1999-11-16 |
| 5853214 | Aligner for a substrate carrier | Richard E. Schultz | 1998-12-29 |
| 5834915 | Sustrate housing and docking system | Richard E. Shultz, John Van Strien | 1998-11-10 |
| 5823361 | Substrate support apparatus for a substrate housing | — | 1998-10-20 |
| 5785186 | Substrate housing and docking system | Richard E. Shultz | 1998-07-28 |
| 5664926 | Stage assembly for a substrate processing system | Jay S. L. Sussman, Richard E. Shultz | 1997-09-09 |