Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12300522 | Apparatus including a substrate chuck, a dispenser, and a planarization head and methods of using the same | Ozkan Ozturk | 2025-05-13 |
| 11951660 | Shaping system including an evaporation cover, shaping process, and method of manufacturing an article | Steven C. Shackleton, Zhengmao Ye | 2024-04-09 |
| 11034057 | Planarization process, apparatus and method of manufacturing an article | Ozkan Ozturk, Seth J. Bamesberger, Masaki Saito, Steven C. Shackleton, Byung-Jin Choi | 2021-06-15 |
| 10895806 | Imprinting method and apparatus | Mehul N. Patel, Edward Brian Fletcher, Seth J. Bamesberger | 2021-01-19 |
| 7880872 | Interferometric analysis method for the manufacture of nano-scale devices | Pawan Kumar Nimmakayala, Tom H. Rafferty, Byung-Jin Choi, Philip D. Schumaker, Daniel Babbs +1 more | 2011-02-01 |
| 7630067 | Interferometric analysis method for the manufacture of nano-scale devices | Pawan Kumar Nimmakayala, Tom H. Rafferty, Byung-Jin Choi, Philip D. Schumaker, Daniel Babbs +1 more | 2009-12-08 |
| 7292326 | Interferometric analysis for the manufacture of nano-scale devices | Pawan Kumar Nimmakayala, Tom H. Rafferty, Byung-Jin Choi, Philip D. Schumaker, Daniel Babbs | 2007-11-06 |