Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10996561 | Nanoimprint lithography with a six degrees-of-freedom imprint head module | Seth J. Bamesberger, Jeremy Lee Sevier, Byung-Jin Choi, Mario Johannes Meissl | 2021-05-04 |
| 10654216 | System and methods for nanoimprint lithography | Xiaoming Lu, Byung-Jin Choi | 2020-05-19 |
| 10416576 | Optical system for use in stage control | Seth J. Bamesberger, Yeshwanth Srinivasan | 2019-09-17 |
| 10248018 | Imprint apparatus and method of manufacturing article | Xiaoming Lu, Wei Zhang, Atsushi Kimura, Jun Ota | 2019-04-02 |
| 10120276 | Imprint apparatus, imprint method, and method of manufacturing article | Yeshwanth Srinivasan, Masahiro Tamura, Takuro Yamazaki | 2018-11-06 |
| 9090014 | High throughput imprint based on contact line motion tracking control | Xiaoming Lu | 2015-07-28 |
| 8945444 | High throughput imprint based on contact line motion tracking control | Xiaoming Lu | 2015-02-03 |
| 8850980 | Tessellated patterns in imprint lithography | Sidlgata V. Sreenivasan, Ian McMackin | 2014-10-07 |
| 8647554 | Residual layer thickness measurement and correction | Christopher Ellis Jones, Niyaz Khusnatdinov, Stephen C. Johnson, Pankaj Lad | 2014-02-11 |
| 8586126 | Robust optimization to generate drop patterns in imprint lithography which are tolerant of variations in drop volume and drop placement | — | 2013-11-19 |
| 8512797 | Drop pattern generation with edge weighting | — | 2013-08-20 |
| 8432548 | Alignment for edge field nano-imprinting | Byung-Jin Choi, Pawan Kumar Nimmakayala | 2013-04-30 |
| 8345242 | Optical system for use in stage control | Babak Mokaberi | 2013-01-01 |
| 8142850 | Patterning a plurality of fields on a substrate to compensate for differing evaporation times | Sidlgata V. Sreenivasan | 2012-03-27 |
| 8119052 | Drop pattern generation for imprint lithography | — | 2012-02-21 |
| 7880872 | Interferometric analysis method for the manufacture of nano-scale devices | Pawan Kumar Nimmakayala, Tom H. Rafferty, Alireza Aghili, Byung-Jin Choi, Daniel Babbs +1 more | 2011-02-01 |
| 7854867 | Method for detecting a particle in a nanoimprint lithography system | — | 2010-12-21 |
| 7785096 | Enhanced multi channel alignment | Pawan Kumar Nimmakayala, Byung-Jin Choi, Tom H. Rafferty | 2010-08-31 |
| 7665981 | System to transfer a template transfer body between a motion stage and a docking plate | Angelo Fancello, Jae Hong Kim, Byung-Jin Choi, Daniel Babbs | 2010-02-23 |
| 7630067 | Interferometric analysis method for the manufacture of nano-scale devices | Pawan Kumar Nimmakayala, Tom H. Rafferty, Alireza Aghili, Byung-Jin Choi, Daniel Babbs +1 more | 2009-12-08 |
| 7292326 | Interferometric analysis for the manufacture of nano-scale devices | Pawan Kumar Nimmakayala, Tom H. Rafferty, Alireza Aghili, Byung-Jin Choi, Daniel Babbs | 2007-11-06 |
| 7136150 | Imprint lithography template having opaque alignment marks | Sidlgata V. Sreenivasan | 2006-11-14 |
| 6978229 | Efficient method for modeling and simulation of the impact of local and global variation on integrated circuits | Sharad Saxena, Carlo Guardiani, Patrick D. McNamara, Dale Coder | 2005-12-20 |